99.95% Ion Source Of Tungsten And Molybdenum Parts
Superior quality Ion Source of Tungsten and Molybdenum Parts
Superior Quality Ion Source Of Tungsten And Molybdenum Parts
Tungsten And Molybdenum Parts source is the neutral atoms or molecules, and to extract ion beam device. It is various kinds of ion accelerator, mass spectrometer, electromagnetic isotope separator, ion implantation, ion beam etching device, ion thruster and controlled fusion device in the neutral beam injector equipment such as indispensable components.
We supply tungsten, molybdenum, titanium and advanced ceramic components and spare parts for ion implanter in OEM quality.
Our main products including cathode, arc chamber, repeller, side/end plate and fastener in ion source of axcelis and varian implanter worked in production processing of 12" and 16" wafer.
Tungsten And Molybdenum Parts is an important process during the manufacture of semiconductors. Implanters dope wafers with "foreign atoms" in order to modify material properties such as conductivity or crystal structure.
Components
| Element | Ti | Zr | C | O | Al | Fe | Mg | Ni | Si | N | Mo |
| Content(wt,%) | 0.4-0.55 | 0.06-0.12 | 0.01-0.04 | ≤0.03 | ≤0.002 | ≤0.01 | ≤0.002 | ≤0.002 | ≤0.002 | ≤0.002 | Remainder |
Tungsten And Molybdenum Parts Specification
| Size | (0.1-40)x(50-600)x(100-1500) mm |
| Density | ≥10.1 g/cm3 |
| Tensile Strength | ≥830 MPa |
| Yield Strength | ≥690 MPa |
| Elongation | ≥10% |
| Hardness | HV240-280 |
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