Product Description:

YJJ AS200 Stainless Steel MFC High-Precision Gas Mass Flow Controller Air Micro-Gas Flow Meter

Features:

AS200 Series Gas Mass Flow Controller

Provides powerful free client-based upper computer software

The AS200 series gas mass flow controller is suitable for various conventional gases, improving the accuracy and reliability of gas mass flow control measurement results. The repeatability accuracy is up to 0.2% F.S.;

The low leakage rate of 1x10-0 Pa·m3/sec He, good air tightness, ensuring production safety; It can support multiple signal outputs, including digital signals, 1-5V analog signals, and 4-20mA analog signals, which can use a single power supply (+15~+28VDC), suitable for different working scenarios; The standard open communication protocol provides convenience for customers to develop control and acquisition software independently; At the same time, the product also provides powerful free client-based upper computer software, facilitating user debugging and operation.

The AS200 series products are developed by Aosong Electronics using advanced MEMS technology. In many aspects such as sensor drive, zero drift control, and valve control, core technologies have been adopted to ensure the high performance, high quality, and high reliability of the products. It is a high-quality instrument with good stability, high precision, low leakage rate, and high pressure resistance.

The AS200 series gas mass flow controller (MFC) is mainly used for precise control and measurement of gas mass flow. AS200 plays an important role in research and production in various fields such as semiconductor integrated circuit technology, special materials, chemical industry, petroleum industry, medicine, environmental protection and vacuum. Its typical application scenarios include: integrated circuit process equipment, such as epitaxy, diffusion, plasma etching, sputtering, ion implantation and various CVD equipment; other industry equipment, such as optical fiber melting, micro reaction devices, gas mixture and gas distribution systems, gas sampling devices, capillary measurement instruments, gas chromatographs and other analytical instruments.

Gas mass flow controller

Power supply: 15 - 24V DC (single pole)

Measurement range: 1 - 100, 2 - 20 3~300SCCM/min

0.03 - 3, 0.05 - 5, 0.1 - 10, 0.2 - 20,

0.3 - 30, 0.5 - 50 SLM/min

Repeatability accuracy: ±0.2% of Full Scale

Response time: 1 second

Operating environment: 5 - 45℃

Size: 112.8 * 38 * 115 mm

Specifications: