Reflective Film Thickness Meter Optical Constants Tester Film Thickness Uniformity Test Machine

I. Overview

The LR-A428 reflective film thickness meter utilizes the principle of reflection interference for non-destructive measurement. By analyzing the interference pattern formed by the reflected light from the film surface and the reflected light from the interface between the film and the substrate, along with the R-Theta stage, it can be compatible with samples ranging from 6 to 12 inches. It can perform rapid scanning of the entire sample, quickly and accurately measuring information such as film thickness and optical constants, and evaluating the uniformity of film thickness.

1. Optical film measurement solution;

2. Non-contact, non-destructive measurement;

3. The core algorithm supports the analysis of thin films to thick films, and single-layer films to multi-layer films.

4. Measurement accuracy of film thickness repeatability: 0.02 nm

5. Fully automatic measurement. The number and position of measurement points can be edited as needed in the Recipe.

II. Product Features

1. Utilizing a high-intensity halogen light source, the spectrum covers the range from ultraviolet to near-infrared.

2. It adopts a highly integrated design of optics, mechanics and electronics, featuring a small size and easy operation.

3. Based on the principle of interference of reflected light at the interface and the lower interface of the thin film layer, it is easy to analyze from a single layer to multiple layers.

4. Equipped with powerful core analysis algorithms: FFT is used to analyze thick films, and curve fitting analysis method is employed to analyze the physical parameter information of thin films;

III. Product Applications

It is widely applied in the measurement of various types of protective films, organic films, inorganic films, metal films, coatings, etc.

Reflective Film Thickness Meter Optical Constants Tester Film Thickness Uniformity Test Machine

Technical Specification