HP Series CNC Vision Measuring Machine – Micron-level Precision Inspection for Semiconductor Components
HP: High-Precision (High Precision)
The main features of the fixed gantry machine are high precision and full automation. "HP" in this context refers to the gantry machine as a "micron-level non-contact automatic optical precision inspection instrument". It helps to enhance the overall production accuracy and productivity for customers.
| Model | HP 442 | HP 662 | HP 872 |
|---|---|---|---|
| Dimensions (mm) (X x Y x Z) | 920*1200*1600 | 1120*1400*1600 | 1320*1600*1600 |
| Measuring range (mm) (X x Y x Z) | 400*400*200 | 600*600*200 | 800*700*200 |
| Accuracy (um) | 1.6 +L/200 | 1.6 +L/200 | 1.6 +L/200 |
| Repeatability (um) | 1.5 | 1.5 | 1.5 |
| Weight (kg) | 560 | 860 | 1600 |
| Resolution | 0.5μm (0.1um for option) | ||
| Camera | Industrial-grade color CCD camera | ||
| Lens | 1x-10x (Variable magnification) | ||
| Magnification | 20X - 200X (The magnification varies depending on the model of the selected camera; the actual magnification is subject to the measured data.) | ||
| Video Magnification | 18~195X (According to the different models of the selected camera; the actual magnification is subject to the measured data) | ||
| Work Distance | 85mm | ||
| Illumination | Programmable surface light, LED bottom parallel light (optional: coaxial light) | ||
| Drive system | CNC control, linear motor drive; Handle control, mouse/keyboard control | ||
| Linear scale resolution (um) | 0.1um | ||
- The whole closed frame moving bridge structure is adopted, the measuring workpiece is fixed, the bearing capacity is large, and the motion performance is good.
- Introduce finite element analysis technology into mechanical design to ensure high rigidity and high precision mechanical structure.
- Grade 000 granite base, high strength, corrosion resistance and good stability.
- Aluminum oxide surface treatment worktable, fast and flexible action control, durable and beautiful.
- RENISHAW open grating ruler, resolution 0.5um, high precision and good stability.
- Precision linear guide rail, ball screw of grinder and AC servo motor ensure the stability of positioning accuracy of machine system.
- 2M pixel high-definition color Giga digital camera meets the requirements of clear observation and stable measurement.
- 6.5x high-definition optical lens, accurate automatic zoom, fast pixel calibration.
- Programmable 5-ring 8-zone LED surface light source, transmission parallel LED contour light source system, intelligent 256 level brightness adjustment.
- Full axis CNC control, AC full closed loop servo motor drive.
HE series large gantry type vision measuring instrument can be equipped with a variety of 3D sensors for comprehensive 2D / 3D composite measurement. It can also be equipped with non-contact sensors such as probe and laser. It also supports RENSHAW full series of probe bracket, so that users can complete the automatic transformation of full-scale measurement on one device, greatly improving productivity.
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