Tungsten and Molybdenum Filament Ion Implantation Components

We provides high quality, precision machined Tungsten and Molybdenum Filament Ion Implantation Components for front-end processing equipment used in the manufacture of semiconductors, including Ion Implantation, MOCVD, CVD, PVD, and MBE tools.FANMETAL manufacturing experience, expertise, and knowledge of the molybdenum and tungsten materials enable us to provide precision machined components and assemblies that meet your exacting specifications.

Tungsten and Molybdenum Filament Ion Implantation Components is an important process in the manufacture of semiconductors. The most important part of an implanted system is the beam path. Here, the ions are generated, concentrated, accelerated, and targeted towards the wafer.

Tungsten and Molybdenum Filament Ion Implantation Components Picture:

The benefits to you:

Simplified component installation and removal

Longer service lives

Lower cleaning costs

Reduced maintenance work

Reduced downtimes

Our products.

Chambers (tungsten, molybdenum and alloys)

Filaments (tungsten and tungsten alloys)

Arc slits (tungsten, molybdenum and alloys)

Holders (tungsten, molybdenum and alloys)

Cathodes (tungsten, molybdenum and alloys)

Spare parts (tungsten, molybdenum and alloys)