Engineered specifically for electronic component cleaning systems handling semiconductors and circuit boards, our Metered Valve ensures ultra-pure cleaning fluid control while preventing contamination. The valve features an ultra-pure internal cavity with Ra 0.05μm polishing and PFA lining to prevent particle shedding (≤1 particle/mL, ≥0.5μm) that could damage sensitive semiconductors.

Compatible with DI water (18.2MΩ*cm) and IPA, the valve utilizes perfluoroelastomer seals that meet SEMI F021 electronic cleaning standards. With precise flow control ranging from 0.1-10mL/min and ±0.1% error tolerance, it adapts perfectly to micro-component cleaning requirements. The anti-pollution design incorporates closed-loop flow to prevent air contact with cleaning fluid, maintaining optimal purity levels.

• Ultra-pure cavity (Ra 0.05μm) with PFA lining ensures ≤1 particle/mL pollution control
• DI water/IPA-compatible perfluoroelastomer seals meet SEMI F021 standards
• Precise flow control (0.1-10mL/min, ±0.1% error) adapts to micro-electronic components
• Closed-loop flow design maintains cleaning fluid purity by avoiding air contact
• Compatible with ultrasonic cleaning machines for automated processes