Liquid Sealed HEPA Air Filter Class 100 Efficiency For Cleanliness Requirements
Liquid Sealed HEPA Air Filter Class 100 Efficiency For Cleanliness Requirements Clean Rooms
Introduction
The liquid sealed HEPA air filter is sealed by a mechanical pressing device so the seal is more reliable and the cleanliness can reach 100 class. It is an ideal final stage filter for industrial or biological clean rooms and is also an ideal auxiliary filter for other purification equipment.
This series air filters can be widely used as the final stage filter for high cleanliness requirements clean rooms used in electronic semiconductor manufacturing, atomic force research, pharmaceuticals, precision machinery, food, cosmetics and other industries.
Product Details
| Application: Microelectronic clean rooms and equipment. Type: HEPA/ULPA fluid seal filtering panel. Frame: Extruded aluminum Separator: Hot-melt beads. Media: Glass fiber,PTFE |
Gasket: SIL-GEL. Grid: Mild steel white epoxy paint. Filterclass acc. EN 1822:H14 / U15. MPPS efficiency:≥99.995% , ≥ 99.9995% . Temperature / Humidity: 70°C / 100% RH. |
Production Process
Parameter
| Size |
Air flow m3/h |
Wind speed m/s |
Initial resistance(Pa) |
Efficiency 0.3um |
Dust capacity (g) |
Weight (Kg) |
| 610*610*50 | 700 | 0.52 | ≤220 | ≥99.99% | 450 | ≈3 |
| 915*610*50 | 1100 | 0.52 | 700 | ≈4.5 | ||
| 1170*570*50 | 1300 | 0.52 | 860 | ≈5.6 | ||
| 1220*610*50 | 1400 | 0.52 | 930 | ≈6 | ||
| 610*610*69 | 1000 | 0.75 | 650 | ≈3.8 | ||
| 915*610*69 | 1500 | 0.75 | 950 | ≈6 | ||
| 1170*570*69 | 1800 | 0.75 | 1100 | ≈7 | ||
| 1220*610*69 | 2000 | 0.75 | 1250 | ≈8 | ||
| 610*610*80 | 1300 | 0.97 | 800 | ≈5 | ||
| 915*610*80 | 1900 | 0.97 | 1200 | ≈7.5 | ||
| 1170*570*80 | 2300 | 0.97 | 1400 | ≈8.8 | ||
| 1220*610*80 | 2600 | 0.97 | 1600 | ≈10 |
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