Laser Interferometer Measurement System with 0.05ppm Accuracy and 1 nm Resolution
Laser interferometry is recognized as a high-precision, highly sensitive measuring method that uses light wavelength as a criterion, widely used in high-end manufacturing. The SJ6000 laser interferometer system incorporates a high-frequency Helium-Neon laser generator from a USA supplier, high-precision environmental compensation modules, advanced laser interference signal processing, and a high-performance computer control system.
Utilizing thermal frequency stabilization technology with laser dual-longitudinal mode and geometric parameters interference optical path design, the SJ6000 delivers long-term stable, high-precision (0.05ppm) laser output within approximately 6 minutes, with powerful anti-interference performance. With various prism modules, it measures linearity, angle, straightness, flatness, perpendicularity, and analyzes dynamic characteristics.
- High Precision Measurement: Nanoscale resolution using laser interferometry technology; eliminates environmental influences with high-precision compensation; ensures long-term frequency stability; separated interferoscope design prevents heat distortion
- Comprehensive Measurement Capabilities: Measures linearity, angle, straightness, perpendicularity and other geometrical parameters; evaluates linear positioning accuracy and repeated positioning accuracy for CNC machine tools, CMMs, and precision motion equipment
- Automatic Error Compensation: Generates error compensation tables for machine tool calibration based on user settings
- Dynamic Analysis: Performs dynamic measurements (displacement-time, velocity-time, acceleration-time curves), amplitude measurement, and frequency analysis for vibration testing and dynamic characteristic evaluation
- Built-in Standards: Includes GB, ISO, BS, ANSI, DIN, JIS standards; generates comprehensive test reports with charts and data
- Environmental Monitoring: Automatically acquires temperature, humidity, and pressure parameters with manual or automatic compensation
- Database Management: Centralized database for measuring records with query capabilities and export to Word, Excel, AutoCAD files
- Portable Design: Lightweight 15kg system for convenient portability
| System Parameters | Environmental Sensors |
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Measuring method: Single frequency Laser frequency accuracy: 0.05ppm Dynamic capture rate: 50kHz Warm-up time: ~6 minutes Operating temperature: 0-40°C Environment: 0-40°C, 0-95% humidity Storage temperature: -20°C to 70°C |
Atmospheric temperature: ±0.1°C (0-40°C), 0.01°C resolution Material temperature: ±0.1°C (0-40°C), 0.01°C resolution Atmospheric humidity: ±5% (0-95%) Atmospheric pressure: ±0.1kPa (65-115kPa) |
| Linear Measurement | Angle Measurement |
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Measuring range: 0-80m Measuring accuracy: 0.5ppm (0-40°C) Resolution: 1nm Maximum speed: 4m/s |
Axial range: 0-15m Measuring range: ±10° Accuracy: ±(0.02%R+0.1+0.24M)″ Resolution: 0.1″ R = indicating value (″), M = measured length (m)
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| Flatness Measurement | |
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| Axial range: 0-15m | Measuring range: ±1.5mm |
| Accuracy: ±(0.2%R+0.02M²) μm | Resolution: 0.1μm |
| Substrate size: 180mm adjustable, 360mm adjustable | |
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R = indicating value (μm), M = measured length (m)
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| Straightness Measurement | Short Straightness | Long Straightness |
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| Axis range | 0.1-4m | 1-20m |
| Measuring range | ±3.0mm | ±3.0mm |
| Accuracy | ±(0.5+0.25%R+0.15M²)μm | ±(5.0+2.5%R+0.015M²)μm |
| Resolution | 0.01μm | 0.01μm |
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R = indicating value (μm), M = measured length (m)
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| Perpendicularity Measurement | Short Straightness | Long Straightness |
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| Axis range | 0.1-3m | 1-15m |
| Measuring range | ±3.0mm | ±3.0mm |
| Accuracy | ±(2.5+0.25%R+0.8M)μm/m | ±(2.5+2.5%R+0.08M)μm/m |
| Resolution | 0.01μm | 0.01μm |
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R = indicating value (μm), M = measured length (m)
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