Laser Interferometer Measurement System Featuring 0.05ppm Precision and 1nm Resolution
Product Overview
Laser interferometer is recognized as a high precision, high sensitivity measuring method that uses light wavelength as a criterion, widely used in high-end manufacturing domains. The SJ6000 laser interferometer system incorporates a high-frequency Helium-Neon laser generator from a USA supplier, high-precision environmental compensation modules, advanced laser interference signal processing, and a high-performance computer control system.
Utilizing thermal frequency stabilization technology of laser dual-longitudinal mode and geometric parameters interference optical path design, the SJ6000 delivers long-term stable, high-precision (0.05ppm) laser output quickly (approximately 6 minutes) with powerful anti-interference performance. With different prism modules, it can measure linearity, angle, straightness, flatness, perpendicularity, and analyze dynamic characteristics.
Key Functions
- High Precision Measurement: Resolution up to nanoscale using laser interferometry technology; High-precision environmental compensation eliminates influences from ambient temperature, pressure, humidity, and material temperature; Laser thermal frequency stabilization ensures long-term frequency stability; Separated interferoscope design prevents heat distortion and ensures interference optical path stability.
- Comprehensive Measurement Capabilities: Measures linearity, angle, straightness, perpendicularity and other geometrical parameters; Measures linear positioning accuracy and repeated positioning accuracy of guide rails for CNC machine tools, coordinate measuring machines, and other precision motion equipment; Measures pitch angle, swing angle, perpendicularity and straightness of guide rails; Calibrates rotary axis of machine tools.
- Automatic Compensation: System automatically generates error compensation tables for machine tool calibration based on user settings.
- Dynamic Analysis: Dynamic measurements (displacement-time curve, velocity-time curve, acceleration-time curve), amplitude measurement and frequency analysis for vibration testing of machine tools, dynamic characteristics of ball screws, response characteristics of drive systems, and dynamic characteristics of guide rails.
- Built-in Standards: Includes domestic and international standards (GB, ISO, BS, ANSI, DIN, JIS); System analyzes and processes data according to relevant standards and generates test reports with corresponding charts and data.
- Environmental Parameter Acquisition: Automatically acquires environmental temperature, material temperature, humidity and atmospheric pressure parameters; Environmental compensation can be set manually or automatically.
- Database Management: Centralized database management for measuring records with query capabilities by object type, testing institution, manufacturing number, inspector, submitted institution, equipment number, inspection date and effective date; Data export to Word, Excel, AutoCAD (optional) files.
- Portable Design: Base weight 15kg for convenient portability and easy installation.
Technical Parameters
System Parameters
| Parameter |
Specification |
| Measuring method |
Single frequency |
| Laser frequency accuracy |
0.05ppm |
| Dynamic capture rate |
50kHz |
| Warm-up time |
Approximately 6 minutes |
| Operating temperature |
(0-40)℃ |
| Environment conditions |
Temperature: (0-40)℃, Humidity: 0-95% |
| Storage temperature |
-20℃ to 70℃ |
Environmental Sensors
| Sensor Type |
Specification |
| Atmospheric temperature sensor |
±0.1℃ (0-40)℃, resolution: 0.01℃ |
| Material temperature sensor |
±0.1℃ (0-40)℃, resolution: 0.01℃ |
| Atmospheric humidity sensor |
±5% (0-95%) |
| Atmospheric pressure sensor |
±0.1kPa (65-115)kPa |
Linear Measurement
| Parameter |
Specification |
| Measuring range |
(0-80)m |
| Measuring accuracy |
0.5ppm (0-40)℃ |
| Measuring resolution |
1nm |
| Maximum measuring speed |
4m/s |
Angle Measurement
| Parameter |
Specification |
| Axial range |
(0-15)m |
| Measuring range |
±10° |
| Accuracy |
±(0.02%R+0.1+0.24M)″ (R is indicating value, unit: ″; M is measured length in m) |
| Measuring resolution |
0.1″ |
Flatness Measurement
| Parameter |
Specification |
| Axial range |
(0-15)m |
| Flatness measuring range |
±1.5mm |
| Accuracy |
±(0.2%R+0.02M²)μm (R is indicating value in μm; M is measured length in m) |
| Substrate size |
180mm adjustable, 360mm adjustable |
| Measuring resolution |
0.1μm |
Straightness Measurement
| Type |
Axis Range |
Measuring Range |
Accuracy |
Resolution |
| Short straightness |
(0.1-4)m |
±3.0mm |
±(0.5+0.25%R+0.15M²)μm |
0.01μm |
| Long straightness |
(1-20)m |
±3.0mm |
±(5.0+2.5%R+0.015M²)μm |
0.01μm |
Note: R is indicating value in μm; M is measured length in meters
Perpendicularity Measurement
| Type |
Axis Range |
Measuring Range |
Accuracy |
Resolution |
| Short straightness |
(0.1-3)m |
±3.0mm |
±(2.5+0.25%R+0.8M)μm/m |
0.01μm |
| Long straightness |
(1-15)m |
±3.0mm |
±(2.5+2.5%R+0.08M)μm/m |
0.01μm |
Note: R is indicating value in μm; M is measured length in meters