ATOP Glass Lens UV Protection Film Electronic Gun Evaporation

Vacuum Coating Machine

1.Accurate optic film deposition controller: crystal thickness monitor/optical monitor.

2.Center-driving or planetary substrate dome is selectable.

3.Uniformed and large area ion beam distribution Hall-ion source.

4.E-beam gun, stable power output, small and uniform E-beam spot.

5.Well uniformity of film thickness, well repeatability of deposition.

The machine is consist of vacuum chamber, Work piece carrier,vacuum pumping system, bias power

supply, coating system, gas system, heating system,working system,control system,alarm system and

electron gun,evaporation source.

1.The traditional vertical or efficient horizontal,equipped with large crucible gun,the film surface is smooth

and uniformity;

2.Equipped with high-power ion source,improve the coating quality and efficiency;

3.Equipped quartz crystal film thickness control device,can realize the film forming rate and automatic

process control;

4.The design of structure can meet the demands of vacuum technology,vacuum system adopt free-oil

system to ensure the whole system work under no oil condition,ensure film clean;