ATOP Multi Arc Vacuum Magnetron Sputtering Coating Machine For Metal Cup Lip

 
1. The high energy emitted by sputtering has significantly enhanced the membrane density and adhesion.
 
 
2. The workpiece frame adopts the public rotation structure, which can set the automatic positive and
 
backward rotation, and the product is even good.
 
 
3. Reasonable configuration, quick pumping rate, low noise, low energy consumption.
 
 
4. The film layer deposited by this equipment can meet customer requirements in terms of density,
 
uniformity, purity and hardness.
 
 
5. The touch screen +PLC can achieve full automatic control, automatic/manual switching.
 
 
 

1. Control system (touch screen + PLC), display detailed parameters in real time, fully automatic control of

the entire production process, and automatic storage of process parameters.


2. The equipment is equipped with high power bias system and the ionizing source auxiliary deposition

coating;
 

3.The Vacuum coating chamber, valves and piping are made of stainless steel vacuum chamber effective

diameter from Φ500 mm to Φ2000 mm.


4. The vacuum system consists of mechanical pump, rotary vane pump, roots pump and a cold well high

vacuum oil diffusion pump or molecular pump;


5. The coating system adopts multiple flat target or cylindrical target, with multiple dc power or medium

frequency power supply.


6. The auxiliary pumping system adopts a low-temperature water vapor trap;


7. The gas flow meter and flow control (display) control of the pneumatic system are adopted.


8. The electric control system shall set up circuit overload, water breaking and sound alarm device of the

broken air;