CsI High Vacuum Deposition System -RT-CsI950
CsI High Vacuum Deposition System is exclusively designed for CsI metallization on scintillation screens in an extremely high vacuum environment.
The CsI scintillators 200~600µm in thickness ranges with high uniformity of thickness and brightness performance.
Cesium Iodide (CsI ) Deposition characterizations:
Ultra- High Spatial Resolution of Imaging;
Fast response for sharper imaging;
Class leading edge-to-edge image areas;
Optical absorb layers or reflector layers;
Low patient X-ray dose;
Application: for security check and inspection, high energy physics education, nuclear radiaton detection and medical imagings: chest examination, mamography, dental inter oral and panoramic.
Substrates Applied: TFT glass, Fiber Optic Plate, Amorphous-carbon plate, Aluminum plate
Equipment Features:
Reliability:
24/7 days non-stop operation;
Inficon Film Thickness Controller to monitor the film thickness inline.
Temperature control accuracy: ±1 ℃, multi-stage setting, automatic temperature data recording and control
Rotary racks equipped with Servo-Motor for high accuracy and stability.
Safety:
High vacuum pump: Magnetic Suspension Molecular Pump, with nitrogen gas blowing device to avoid hazard material be exposed in the air;
All electrodes are equipped with safety protection sleeves.
Repeatability & Reproducibility:
Through high precised parameter control system,
Automated process control software and program,
User friendly operation.
Efficiency:
CsI-950A+ model is with 2-rotary rack structure based on Generation -one CsI-950 model.
Double-capacity for max. size substrate: 500 x400mm.
Technical Specifications
|
Description |
RT-CsI950 |
|
|
Deposition chamber (mm)
|
φ950 x H1350 |
φ800 x H800 |
|
Capacity |
2 |
1 |
|
Evaporation sources |
2 |
4 |
|
Dry and Dehumidity |
Iodine tungsten lamp Max. 300℃ |
Iodine tungsten lamp Max. 200℃ |
|
Ultimated vacuum pressure (Pa) |
8.0×10-5Pa |
5.0×10-4Pa |
|
Deposition Film Thickness Controller |
Quartz Control x 1 |
NONE
|
|
Power Consumption (KW) |
Max. approx. 50 Average approx. 20 |
Max. approx. 20 Average approx. 10 |
|
Footprint (L*W*H) |
3000*2150*2100mm |
1800*2300*2100mm |
|
Operation & Control System
|
CE standard Mitsubishi PLC+ Touch Screen Operation Program with backup |
|
In addition to the RT-CsI950 equipment, we also provide its post-processing machines which to generate protective layer on the top of CsI film.
-- RTEP800, which is using the thermal evaporation coating technology. Please contact us for more specifications, Royal Technology is honored to provide you total coating solutions.
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