KGD - MQ - 536 Infrared Gas Sensor / Infrared Gas Leak Detector for Precise Monitoring
Price:
Negotiable
MOQ:
1PCS
Delivery Time:
5-8 work days
Brand:
KACISE
Product Description
KGD - MQ - 536 Infrared Gas Sensor / Infrared Gas Leak Detector for Precise Monitoring
The KGD - MQ - 536 Infrared Gas Sensor is a high-precision detection device based on Non-Dispersive Infrared (NDIR) technology, designed for accurate measurement of specialized gases in semiconductor applications.
Key Specifications
| Attribute | Value |
|---|---|
| Detection Principle | NDIR |
| Detected Gases | WF6, CF4, SF6, NF3, CO2 |
| Measuring Range | 1 - 264ppm (0 - 200mTorr) |
| Repeatability | ±0.5% |
| Linearity | ±1%F.S. |
| Detection Limit | 1ppm |
Product Features
- Advanced NDIR technology for multi-gas monitoring (WF6, CF4, SF6, NF3, CO2)
- Fast response time with high sensitivity detection
- No consumables required for operation
- Supports both analog and digital communication protocols
- Modular design for easy system integration
Industrial Applications
Ideal for endpoint detection in semiconductor deposition and cleaning processes, as well as terminal detection for chamber cleaning. Helps reduce cleaning time, lower operational costs, and increase production efficiency.
Technical Parameters
| Parameter | Details |
|---|---|
| Detection Principle | NDIR |
| Detected Gases | WF6, CF4, SF6, NF3, CO2 |
| Measuring Range | 1 - 264ppm (0 - 200mTorr) |
| Repeatability | ±0.5% |
| Linearity | ±1%F.S. |
| Detection Limit | 1ppm |
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Get in Touch
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Company
Xi'an Kacise Optronics Co.,Ltd.
Location
2nd Building, Tianyuan International Mansion, High-tech Zone, Xi'an City, Shaanxi Province, China
Contact Person
Evelyn Wang