KGD-MQ-537 NDIR Infrared Gas Sensor with Multi-Gas Monitoring and 1ppm Detection Limit for Semiconductor Applications
Price:
Negotiable
MOQ:
1PCS
Delivery Time:
5-8 work days
Brand:
KACISE
Product Description
KGD-MQ-537 Infrared Gas Sensor
Product Overview
KGD - MQ - 537 Infrared Gas Sensor
The KGD-MQ-537 Infrared Gas Sensor utilizes Non-Dispersive Infrared (NDIR) technology to accurately measure gases including SiF4, CF4, SF6, NF3, and CO2 in semiconductor applications. Designed with compatibility for common equipment dimensions, flanges, and communication protocols, this sensor is ideal for endpoint detection in semiconductor deposition and cleaning processes, as well as terminal detection for chamber cleaning, helping to reduce cleaning time, cut costs, and increase production.
Key Features
- Utilizes NDIR technology with multi-gas monitoring capability (SiF4, CF4, SF6, NF3, CO2, etc.)
- Fast response time and high sensitivity
- No consumables required
- Analog/digital communication options
- Modular design for easy integration
Technical Specifications
| Parameter | Details |
|---|---|
| Detection Principle | NDIR |
| Detected Gases | SiF4, CF4, SF6, NF3, CO2 |
| Measuring Range | 1-264ppm (0-200mTorr) |
| Repeatability | ±0.5% |
| Linearity | ±1% F.S. |
| Detection Limit | 1ppm |
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Company
Xi'an Kacise Optronics Co.,Ltd.
Location
2nd Building, Tianyuan International Mansion, High-tech Zone, Xi'an City, Shaanxi Province, China
Contact Person
Evelyn Wang