120kHz High-Frequency Ultrasonic Scattering Spray Equipment
Description:
The 120kHz high-frequency ultrasonic scattering spray equipment leverages the 120kHz high-frequency resonance of piezoelectric transducers to gently atomize liquid feedstock into fine, uniformly dispersed micron-sized droplets. Featuring a built-in vortex flow channel inside the nozzle, the carrier gas forms a rotating wide-angle scattering spray field, endowing the aerosol stream with excellent flow-wrapping capability.
It delivers conformal, integrated and uniform coating for workpieces with planar surfaces, steps, trenches, sidewalls, curved surfaces and other diverse 3D microstructures. It addresses a long-standing industry limitation of conventional focused ultrasonic nozzles: poor wetting on sidewalls and uneven film thickness on substrates with complex topography.
The complete system integrates a precision micro-liquid feeding unit, carrier gas pressure regulation system, and XYZ three-axis motion platform, with an optional temperature control module. The spray features soft kinetic energy without high-pressure impact, which reliably protects delicate precision substrates. It drastically reduces overspray and slurry splashing, achieving far higher material utilization than traditional two-fluid spraying. The nozzle boasts superior anti-clogging performance and lower long-term operation and maintenance costs.
Coating thickness can be precisely tuned from tens of nanometers to tens of microns, delivering outstanding film uniformity. Compatible with low-viscosity solutions and nano-suspensions, it is widely applied in fuel cell MEAs, semiconductor wafers, MEMS devices, sensing elements, medical balloon catheters, optical thin films, electronic insulating coatings and more. It satisfies ultra-thin film fabrication demands ranging from cutting-edge R&D to pilot-scale production.
Parameters:
| Model |
FSW-1202-L |
| Name |
120Khz Scattering Ultrasonic Nozzle Atomization |
| Frequency |
120Khz |
| Atomized particle size range(μm) |
10-35 |
| Spray width(mm) |
40-80 |
| Spray flow(ml/min) |
0.5-20 |
| Spray height(mm) |
30-80 |
| Liquid viscosity (cps) |
<10 |
| Particle size (μm) |
<5 |
| Diversion pressure (Mpa) |
<0.05 |
| Application |
widely applied in MEMS, semiconductor wafers, PEM fuel cells, sensors, medical balloon catheters and optical thin films |
Core Advantages :
✅ 120kHz high-frequency atomization generates droplets with uniform particle size, balancing fine atomization quality and spraying efficiency
✅ Vortex wide-angle scattering spray enables conformal coating on 3D trenches, steps, curved surfaces and sidewalls
✅ Low-kinetic soft spray safeguards fragile precision substrates and effectively suppresses slurry agglomeration
✅ Nanoscale film thickness control with stable and consistent coating performance
✅ High raw material utilization reduces liquid waste; nozzle resists clogging for easy maintenance
✅ Modular integrated architecture, expandable with heating stages, vacuum chucks and fully automatic motion platforms
120kHz High-Frequency Ultrasonic Scattering Spray Equipment
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