YT-95H Fixed Gas Detector with 0.1ppm Resolution and Electrochemical Sensor for NF₃ – Ex d IIC T6 Gb Certified
Professional fixed gas detection system specifically designed for monitoring Nitrogen Trifluoride (NF₃) in industrial environments.
The YT-95H series is a cost-effective, explosion-proof fixed gas transmitter designed for continuous monitoring of oxygen, flammable gases and toxic gases. It integrates 3-wire 4-20mA, RS485 Modbus and relay output, making it compatible with most control systems (PLC, DCS, SCADA). The relay can directly control external devices such as horns, alarm lights and fans.
For NF₃ (Nitrogen Trifluoride) monitoring – a toxic gas widely used in semiconductor manufacturing and plasma etching – the YT-95H uses an electrochemical sensor with a measuring range of 0–50 ppm or 0–100 ppm (selectable) and a resolution of 0.1 ppm.
- Electrochemical sensor for NF₃ – 0-50/100ppm range, 0.1ppm resolution, fast response (T90 ≤20s).
- Multiple outputs – 3-wire 4-20mA, RS485 Modbus, relay (controls external alarms/fans).
- Optional sound/light alarm – >90dB, user-adjustable set points.
- Infrared remote control – Non-intrusive adjustment of alarm points, zero calibration, address modification.
- Rugged & explosion-proof – Die-cast aluminum housing, IP65, Ex d IIC T6 Gb for hazardous areas.
- Optional wireless – LoRa or 4G for remote data access.
- Low maintenance – Repeatability ≤ ±1%, zero shift ≤ ±1% per year.
- Easy installation – G1/2 external thread, M45*2mm thread size, 12-36V DC power.
| Parameter | Value |
|---|---|
| Gas Detected | NF₃ (Nitrogen Trifluoride) |
| Detection Principle | Electrochemical |
| Measuring Range | 0 – 50 ppm / 0 – 100 ppm (customizable) |
| Resolution | 0.1 ppm |
| Accuracy | ≤ ±2% FS (depending on sensor) |
| Response Time (T90) | ≤20 seconds |
| Repeatability | ≤ ±1% |
| Zero Shift | ≤ ±1% (F.S./year) |
| Display | 4-digit Nixie tube |
| Output Signals | 3-wire 4-20mA, RS485 Modbus, relay |
| Optional Outputs | LoRa/4G wireless, sound/light alarm (>90dB) |
| Configuration | Infrared remote controller (included) |
| Connection Mode | G1/2 external thread explosion-proof flexible pipe |
| Thread Size | M45 * 2 mm |
| Operating Temperature | -20°C ~ +50°C |
| Operating Humidity | 0–95% RH (non-condensing) |
| Housing Material | Die-cast aluminum (case); sensor housing: aluminum alloy or 316 stainless steel |
| Power Supply | 12–36V DC |
| Dimensions | 180 * 150 * 90 mm |
| Weight | ≤1.6 kg |
| Explosion-Proof Grade | Ex d IIC T6 Gb |
| Protection Grade | IP65 |
Nitrogen trifluoride (NF₃) is a colorless, toxic, and stable gas widely used in the electronics industry as a chamber cleaning agent and etchant in plasma processes for semiconductor, flat‑panel display, and solar cell manufacturing. While NF₃ is not ozone‑depleting, it is a potent greenhouse gas with a high global warming potential. Exposure to high concentrations can cause methaemoglobin formation and affect the liver and kidneys. Reliable detection is essential to protect workers and the environment.
- Semiconductor manufacturing – NF₃ used in chamber cleaning and plasma etching.
- Flat panel display & solar cell production – NF₃ as a fluorine-based etchant.
- Chemical industry – Monitoring NF₃ leaks in storage and handling areas.
- Electronics fabrication – Process gas monitoring in cleanrooms.
- Research laboratories – Toxic gas detection where NF₃ is used.
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1. What is the accuracy of the YT-95H for NF₃ detection?
≤ ±2% FS (depending on the specific sensor). -
2. What is the response time (T90)?
≤20 seconds. -
3. How often does the sensor drift?
Zero shift ≤ ±1% F.S. per year. -
4. What output signals does the detector provide?
3-wire 4-20mA analog, RS485 Modbus, and relay output. -
5. Can I adjust alarm set points without opening the enclosure?
Yes. Use the included infrared remote controller for alarm point settings, zero calibration and address modification. -
6. Is there an optional sound/light alarm?
Yes. Optional sound/light alarm (>90dB) with user-settable alarm points. -
7. What is the explosion-proof rating?
Ex d IIC T6 Gb (suitable for Zone 1 and Zone 2 hazardous areas). -
8. What is the protection rating?
IP65 – waterproof, dustproof and explosion-proof. -
9. Can I monitor data remotely?
Yes. Optional LoRa or 4G wireless transmission allows remote data viewing on a laptop or mobile phone. -
10. What power supply is required?
12–36V DC.
Shenzhen YuanTe Technology Co., Ltd. (Safegas) – Founded in 2010, a national high-tech enterprise specializing in R&D, production and sales of gas detection equipment and systems. With over 16 years of experience, the company serves semiconductor, oil & gas, chemical, environmental, and industrial sectors. Products are ISO9001 & ISO45001 certified, holding IECEx, ATEX and EMC certifications. Annual capacity exceeds 80,000 units. Fast delivery (5-7 working days) and 24/7 after-sales support are available.
- Established since 2010 – Over 16 years of experience in gas detection R&D and manufacturing.
- Full product range – Portable detectors, fixed transmitters, analyzers, control panels, accessories.
- International certifications – IECEx, ATEX, EMC certified for hazardous areas.
- Wide gas & industry coverage – Hundreds of gases; serve oil & gas, chemical, mining, environmental, food, pharma, and more.
- Strong R&D & quality – ISO9001 & ISO45001 certified; professional R&D team and global service network.
- High production capacity – Over 80,000 units per year with fast delivery (5–7 working days typical).
- Global customer support – 24/7 after-sales service and solutions tailored to diverse industries.
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