High Precision RS485 RS232 Gas Mass Flow Meter with 0.5% Accuracy and 3MPa Pressure Range for Industrial Applications
High precision gas mass flow meter designed for accurate measurement of single or mixed gases with RS485/RS232 communication capabilities and analog output options.
- Compact design with minimal space requirements
- Digital display for immediate flow rate reading
- Durable construction for extended service life
- Multiple control modes and analog output selection
- High accuracy measurement with fast response time
- Low failure rate for reliable operation
| Parameter | Specification |
|---|---|
| Flow Range | (0~5,10,20,30,50,100,200,300,500...) SCCM (0~1,2,3,5,10,50,100,200,500...) SLM |
| Accuracy | ±1% F.S / ±0.5% F.S |
| Linearity | ±0.5~1.5% F.S |
| Repeatability | ±0.2% F.S |
| Response Time | Electrical: 10 sec, Gas: 1-4 sec |
| Differential Pressure | 0.1~0.5 MPa |
| Maximum Pressure | 3 MPa |
| Working Temperature | 0~70℃ |
| Digital Output | RS485 MODBUS |
| Analog Output | DC 0~5V, 4~20mA |
| Power Supply | DC +15V/24V, flow meter |
| Electrical Connection | DB15 |
| Leakage Rate | 1×10⁻⁸ SCCS He |
| Base Material | 316L Stainless Steel |
| Seal Material | FKM, nitrile butadiene rubber, chloroprene rubber |
| Connection Size | Φ3, Φ6, Φ10, 1/8", 1/4", 3/8" |
The flow meter base and gas-contact surfaces are made from SS316L stainless steel, providing excellent corrosion resistance for measuring weak corrosive gases. Special materials available for strong corrosive gases and organic solvents upon request.
Standard accuracy of 0.5% full scale with 1.0% reading accuracy and 0.2% repeatability. Controller accuracy maintained at 1.0% full scale.
Miniature gas mass flow controller shares the same flow range as the meter, featuring 50:1 valve control range ratio and 1.0% proportional control valve accuracy.
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