Leading Chinese manufacturer of VCR UHP pneumatic diaphragm valves for semiconductor, lab and pharmaceutical gas systems. Factory direct price, sample available, custom options supported
Price:
Negotiable
MOQ:
1
Delivery Time:
7~10 day
Brand:
AFKLOK
Product Description
Ultra High Purity VCR Pneumatic Diaphragm Valve for UHP Gas Delivery Systems
Our ultra high purity VCR pneumatic diaphragm valve is engineered for critical ultra-high purity (UHP) gas delivery applications, delivering reliable on/off control for semiconductor manufacturing, specialty gas cabinets, and laboratory gas systems. Constructed from 316L VIM-VAR vacuum-melted stainless steel with an electropolished flow path, this valve minimizes particle generation and gas adsorption, ensuring zero contamination for sensitive process gases. All units undergo 100% helium leak testing before delivery, providing stable performance for 24/7 continuous production lines.
| Category | Parameters |
|---|---|
| Valve Type | Pneumatic Actuated Diaphragm Valve (NC/NO Optional) |
| Connection Type | Standard VCR Face Seal, 1/4", 3/8", 1/2" available |
| Body Material | 316L VIM-VAR Vacuum Melted Stainless Steel |
| Diaphragm Material | Cobalt-based Super Alloy + PCTFE Soft Seat |
| Wetted Surface Finish | Electropolished, Ra ≤ 0.25μm (Ra ≤ 0.13μm customizable) |
| Actuation Pressure | 0.4 ~ 0.6 MPa (58 ~ 87 psig) |
| Operating Pressure Range | Vacuum ~ 150 psig (10 bar) |
| Operating Temperature | -10°C ~ +80°C (high temp version up to 200°C optional) |
| Helium Leak Rate | ≤ 1×10⁻⁹ mbar·L/s (external leakage) |
| Rated Cycle Life | ≥ 1,000,000 on/off cycles |
| Cv Value Range | 0.2 ~ 0.7 (varies by port size) |
| Compliance | RoHS, SEMI UHP Gas Standard Compatible |
Ultra-High Purity Flow Path with Zero Dead Space
The flow path adopts a zero dead space design to eliminate gas residue and particle entrapment, fully meeting the cleanliness requirements of semiconductor front-end processes. All wetted surfaces are precision electropolished to reduce gas adsorption and particle precipitation, effectively avoiding contamination of wafers and process products. Core assembly is completed in a Class 100 clean workshop, and each valve is purged with high-purity nitrogen and vacuum-sealed before delivery to ensure cleanliness upon installation.
Ultimate Sealing Performance for Hazardous Gases
The metal diaphragm structure completely isolates the process medium from the pneumatic actuator, fundamentally eliminating stem leakage risks. Matched with VCR metal gasket face seal connections and precision lapped sealing surfaces, the valve achieves an ultra-low external leak rate of ≤ 1×10⁻⁹ mbar·L/s verified by helium mass spectrometer testing. It is suitable for silane, phosphine, HCl, HF and other toxic, corrosive and flammable specialty gases, ensuring maximum safety for production lines and operators.
Long Service Life & Low Maintenance
The diaphragm is made of high-strength cobalt-based super alloy, with optimized stress distribution design to resist fatigue under frequent on-off operations. The wear-free pneumatic actuator supports long-term maintenance-free operation, making it ideal for round-the-clock continuous production scenarios. The modular structure allows on-site diaphragm replacement, greatly reducing downtime and maintenance costs compared with integrated valve solutions.
Precise & Stable Flow Control
With a stable Cv value design, the UHP pneumatic diaphragm valve delivers consistent flow control accuracy, perfectly matching the process requirements of thin film deposition, etching, diffusion and other semiconductor manufacturing processes. Strict SPC process control is implemented throughout production, and each valve undergoes full inspection of pressure resistance, sealing and action performance before delivery to ensure batch consistency and long-term operating stability.
Industry Applications
Our VCR UHP pneumatic diaphragm valves are widely used in high-demand industries where gas purity and leakage safety are critical:
- Semiconductor Wafer Manufacturing: Etching, ALD, CVD, diffusion and cleaning process gas lines
- Specialty Gas Systems: Gas cabinets, VMB (Valve Manifold Box) and VMP gas distribution panels
- Photovoltaic & Display: PECVD processes for solar cells and OLED flat panel production
- Laboratory R&D: University and institutional high-purity gas delivery systems
Compatible media includes high-purity inert gases (Ar, He, N₂), process specialty gases, corrosive gases, and vacuum operating conditions.
Quality Control & Testing Assurance
We maintain strict quality control at every production stage to ensure each UHP diaphragm valve meets consistent high performance:
- 100% Helium Leak Testing: Every valve is tested by helium mass spectrometer before delivery, with individual test reports traceable by unique serial number.
- Full Material Traceability: Raw material furnace batch numbers and composition test reports are retained for each valve, supporting full supply chain audit.
- Clean Assembly & Packaging: Final assembly, cleaning and packaging are completed in a dust-free workshop, with nitrogen-filled sealed packaging to prevent secondary pollution.
- Full Performance Inspection: Dimension inspection, pressure resistance test and action performance test are implemented for every unit to ensure 100% qualification rate.
FAQ
Q: Can this UHP pneumatic diaphragm valve replace Swagelok or Fujikin equivalent models?
A: Yes. Our VCR pneumatic diaphragm valve matches standard industry connection dimensions, performance parameters and mounting hole positions, serving as a cost-effective direct replacement for premium imported equivalents. Contact us for the full compatibility model list.
Q: What is the lead time for sample and bulk orders?
A: Standard sample orders ship within 3 working days. Bulk production takes 7-15 working days, and expedited production is available for urgent orders. We will confirm the exact delivery date before order placement.
Q: Do you support sample orders for testing?
A: Yes, we support 1-piece sample orders for performance testing and installation verification. Sample fees can be deducted from subsequent bulk orders.
Q: What warranty do you provide for this product?
A: We provide a 12-month warranty for all UHP pneumatic diaphragm valves, covering material and manufacturing defects under normal use. We also provide lifelong technical support and spare parts supply.
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Get in Touch
Have questions about our products or want to discuss a custom order? Our team is ready to help you.
Company
Shenzhen Wofly Technology Co., Ltd.
Location
Foor 2, 4th Buidling, A Zone, Xinhe Xinxing Industrial 3th Zone, Fuhai Avenue, Baoan, Guangdong, China.
Contact Person
Catlin Zeng