ion implantation parts in molybdenum and tungsten for semiconductor

Our Produces high-quality ion-implanted high-temperature parts made of tungsten, molybdenum and tantalum. The corrosion resistance, material strength, high thermal conductivity and absolute purity are greatly improved, and the performance is stable. We can guarantee excellent ion generation, accurate and free of impurities in the optical path to the wafer.

ion implantation parts in molybdenum and tungsten Properties

Excellent corrosion resistance

- Melting point

Excellent creep resistance

Good electrical and thermal conductivity

outstanding purity

Our heat-resistant components are made of molybdenum, tungsten, graphite or ceramics and offer good corrosion resistance, material strength, high thermal conductivity and absolute purity.

We can design, produce and process ion implantation parts in molybdenum and tungsten of different specifications and shapes according to customer requirements, and can provide key tungsten, molybdenum and tantalum components and consumables for the ion implanter arc reaction chamber (large beam current, medium beam current, high energy).

​JX supplies high quality consumables and replacement parts for ion implanter beamlines. Equipment upgrades and modifications based on customer process improvement requirements are an additional service.

Ion Implantation Parts In Molybdenum And Tungsten Picture: