Aluminum Nitride Ceramic Electrostatic Chuck with 3.3g/cm³ Density and 170W/m·K Thermal Conductivity
Price:
1us$/p
MOQ:
10p
Delivery Time:
10days
Brand:
Wuxi Special Ceramic
Product Description
Product Overview
Electrostatic Chuck Aluminum Nitride Ceramic is engineered for semiconductor wafer processing applications. This advanced material utilizes electrostatic forces to securely hold wafers during manufacturing processes while providing exceptional thermal management and electrical insulation.
Key Specifications
| Property | Value |
|---|---|
| Density | 3.3 g/cm³ |
| Surface Roughness | Ra ≤ 6μm |
| Thermal Conductivity | 170 W/m·K |
| Maximum Use Temperature | 1700℃ |
| Flexural Strength | ≥330 MPa |
| Dielectric Strength | ≥15 KV/mm |
| Insulation Resistance | >10¹² Ω·cm |
Material Properties
- High thermal conductivity for efficient heat dissipation
- Excellent electrical insulation properties
- Superior chemical resistance to harsh environments
- High dielectric strength for reliable performance
- Exceptional mechanical strength and durability
Applications
- Semiconductor wafer processing electrostatic chucks
- High-power electronic devices and LED packages
- Aerospace components and thermal management systems
- Automotive sensors and high-temperature applications
- Medical equipment requiring biocompatible ceramics
Customization Options
Wuxi Special Ceramic offers comprehensive customization services including:
- Custom sizes and shapes to meet specific requirements
- Various surface finishes (polished, glazed, textured)
- Color customization for aesthetic requirements
- Additional features including holes, grooves, and special geometries
Product Image
Frequently Asked Questions
What is the brand name of this product?
Wuxi Special Ceramic
Where is this product manufactured?
China
What are the primary applications for Aluminum Nitride Ceramic?
Semiconductor processing, high-power electronics, aerospace components, automotive sensors, and medical equipment.
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Get in Touch
Have questions about our products or want to discuss a custom order? Our team is ready to help you.
Company
Wuxi Special Ceramic Electrical Co.,Ltd
Location
No4 Longshan Road,Xinwu District,Wuxi City,Jiangsu Province
Contact Person
Zhu