Alumina Porous Ceramic Vacuum Chuck Table 5-600mm Round 50-1000mm Square with 400MPa Flexural Strength
Price:
us$10~us$100/p
MOQ:
10p
Delivery Time:
negotiable
Brand:
wuxi special ceramic
Product Description
Alumina Porous Ceramic Vacuum Chuck Table
Work pieces can be adhesively fixed by aligning the porous ceramic to the metal or ceramic body and applying negative pressure from the back and sides. The uniformly distributed microscopic pores prevent damage and scratches on work pieces, significantly improving yield rates for manufacturing applications.
Key Features
- Reusable design for long-term operation
- Excellent depletion resistance
- Dust-free operation maintains clean environments
- Lightweight construction for easy handling
Available Sizes
Round: Φ5mm to Φ600mm | Square: 50mm×50mm to 1000mm×1000mm
Applications
Semiconductor wafer dicing, grinding, washing, LED manufacturing, printing processes
Precise Porous Ceramic Partial Vacuum Chuck
Optimized solution for work pieces with specific shapes, providing regional adhesion capabilities and superior performance in demanding industrial environments.
Advanced Features
- Regional adhesion for partial surface gripping
- High heat resistance up to operating temperatures
- Corrosion resistance for chemical environments
- Depletion resistance for extended service life
- Lightweight design for robotic integration
- High electrical insulation properties
- Dust-free operation maintains clean room standards
Customization Options
Available in specific sizes, shapes, body materials, and porous sizes. Modular design enables installation in various institutions and robotic systems.
Technical Specifications
- Porous base design for simplified mounting
- Double vent design supports suction/blowing/floating functions
- Flatness: 0.01-0.05mm
- Customizable appearance dimensions
Industrial Applications
- Ceramic vacuum gripping modules for flat work pieces
- Maintains grip with only partial surface contact
- Single ceramic gripper accommodates multiple work pieces
- Ideal for clean environments in machine production, factory automation, and assembly industries
Technical Specifications: Porous Alumina Ceramics (Al₂O₃)
| Property Category | Property | Unit | Value |
|---|---|---|---|
| General Properties | Main Chemical Ingredient | Al₂O₃ 99.9% | |
| Bulk Density | g/cm³ | 3.9 | |
| Color | - | Ivory | |
| Water Absorption | % | 0 | |
| Main Characteristics | Good Anti-Plasma, Wear Resistance, High Purity | ||
| Main Applications | Wear Resistant Parts, Chemically Resistant Parts, Semiconductor Processing Equipment Parts | ||
| Mechanical Properties | Flexural Strength | Mpa | 400 |
| Elastic Modulus | Gpa | 380 | |
| Vickers Hardness | Gpa | 17.5 | |
| Fracture Toughness (k l c) | Mpa*M*1/2 | 5-6 | |
| Thermal Properties | Thermal Conductivity (20℃) | w/mk | 34 |
| Coefficient of Thermal Expansion (40-400℃) | 1x10-6/℃ | 7.2 | |
| Coefficient of Thermal Expansion (40-800℃) | 1x10-6/℃ | 8 | |
| Electrical Properties | Dielectric Strength (1mhz) | kv/mm | 15 |
| Dielectric Constant (1MHZ) | 25℃ | 9.9 | |
| Volume Resistivity (20℃) | ohm-cm | ＞10^14 | |
| Volume Resistivity (300℃) | ohm-cm | 10^13 | |
| Volume Resistivity (500℃) | ohm-cm | 10^10 | |
Manufacturing Capabilities
Wuxi Special Ceramic Electrical specializes in producing alumina, silicon nitride, zirconia, steatite, boron nitride, cordierite, and mullite products for applications in metal welding, electronic conductors, mechanics, assembly, insulation, chemicals, instrumentation, textiles, nuclear industry, and aerospace fields.
Production Timeline
- Trial production: 15 days (based on drawings or samples)
- Mass production: 30 days
- Packaging: Carton or PLT (negotiable)
Our products are supplied to Toshiba Lighting Group in Japan and Europe, maintaining high quality standards and quick delivery schedules.
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Get in Touch
Have questions about our products or want to discuss a custom order? Our team is ready to help you.
Company
Wuxi Special Ceramic Electrical Co.,Ltd
Location
No4 Longshan Road,Xinwu District,Wuxi City,Jiangsu Province
Contact Person
Zhu