Al2O3 Ceramic Valve Pads for Semiconductor Equipment - 1600°C Temperature Resistance, 330 MPa Strength
Price:
us$0.1~us$10/p
MOQ:
10p
Delivery Time:
negotiable
Brand:
wuxi special ceramic
Product Description
High Temperature Alumina Ceramic Valve Pads for Semiconductor Applications
Precision-engineered Al2O3 ceramic valve pads designed specifically for semiconductor manufacturing equipment, offering exceptional mechanical strength and thermal stability up to 1650°C.
Key Product Features
- High temperature resistance (1600-1650°C maximum use temperature)
- Excellent mechanical strength with 300-330 MPa flexural strength
- Superior thermal conductivity (25-27.5 W/m·K)
- Outstanding electrical insulation properties
- Exceptional corrosion and chemical resistance
- High hardness (80-82 HRA Rockwell hardness)
Semiconductor Ceramic Components Portfolio
We manufacture a comprehensive range of precision ceramic components for semiconductor applications:
- Windows and domes
- Wafer chucks and arms
- Focus rings and cover rings
- Gas distribution plates and nozzles
- Insulators and liners
- Process tubes and air bearings
Our ultra-flat ceramic vacuum wafer chucks enhance yield management for semiconductor wafer processing, with low-surface-contact configurations that minimize back-side particle contamination.
Material Specifications
| Property | Unit | 96% Alumina | 99% Alumina |
|---|---|---|---|
| Density | g/cm³ | 3.7 | 3.85 |
| Flexural Strength (20°C) | MPa | 300 | 330 |
| Compressive Strength (20°C) | MPa | 2000 | 2000 |
| Thermal Conductivity | W/m·K | 25 | 27.5 |
| Maximum Use Temperature | °C | 1600 | 1650 |
| Dielectric Strength | KV/mm | >12 | >10 |
| Volume Resistivity (20°C) | Ω·cm | >10¹⁴ | >10¹⁴ |
Manufacturing Capabilities
Wuxi Special Ceramic Electrical Co., Ltd specializes in producing alumina (95%-99.98% Al2O3), silicon nitride, zirconia, steatite, boron nitride, cordierite, and mullite products.
We accept custom manufacturing according to drawings or samples with trial production typically completed within 15 days and mass production within 30 days.
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Get in Touch
Have questions about our products or want to discuss a custom order? Our team is ready to help you.
Company
Wuxi Special Ceramic Electrical Co.,Ltd
Location
No4 Longshan Road,Xinwu District,Wuxi City,Jiangsu Province
Contact Person
Zhu