Semiconductor Wafer Handling Ceramic Suction Plates - Alumina & Zirconia Components with 280-950 MPa Flexural Strength
Price:
us$0.1~us$10/p
MOQ:
10p
Delivery Time:
negotiable
Brand:
wuxi special ceramic
Product Description
Semiconductor Wafer Handling Ceramic Suction Plates
Custom-engineered alumina and zirconia ceramic suction plates designed for precision wafer handling in semiconductor manufacturing applications. These components offer exceptional dimensional stability and mechanical strength for demanding semiconductor environments.
Semiconductor Ceramic Components Portfolio
- Windows
- Wafer chucks and arms
- Focus rings
- Gas distribution plates
- Cover rings
- Insulators
- Liners & process tubes
- Nozzles
- Domes
- Air bearings
Technical Specifications Comparison
| Properties | Units | 95 Alumina | 99 Alumina | Zirconia |
|---|---|---|---|---|
| Density | g/cm³ | 3.65 | 3.92 | 5.95-6.0 |
| Water Absorption | % | 0 | 0 | 0 |
| Coefficient of Thermal Expansion | 10⁻⁶/K | 7.9 | 8.5 | 10.5 |
| Modulus of Elasticity | GPa | 280 | 340 | 210 |
| Poisson's Ratio | / | 0.21 | 0.22 | 0.3 |
| HV Hardness | MPa | 1400 | 1650 | 1300-1365 |
| Flexural Strength @ Room Temperature | MPa | 280 | 310 | 950 |
| Flexural Strength @ 700℃ | MPa | 220 | 230 | 210 |
| Compressive Strength @ Room Temperature | MPa | 2000 | 2200 | 2000 |
| Fracture Toughness | MPa·m½ | 3.8 | 4.2 | 10 |
| Heat Conductivity @ Room Temperature | W/m·K | 18-25 | 26-30 | 2.0-2.2 |
| Electrical Resistivity @ Room Temperature | Ω·mm²/m | >10¹⁵ | >10¹⁶ | >10¹⁵ |
| Max Application Temperature | ℃ | 1500 | 1750 | 1050 |
| Resistance to Acid Alkaline | / | High | High | High |
| Dielectric Constant | / | 9.5 | 9.8 | 26 |
| Dielectric Strength | kV/mm | 16 | 22 | / |
| Thermal Shock Resistance | ΔT(℃) | 220 | 180-200 | 282-350 |
| Tensile Strength @ 25℃ | MPa | 200 | 248 | 252 |
Manufacturer Profile
Wuxi Special Ceramic Electrical Co., Ltd
Specializing in advanced ceramic manufacturing including alumina, silicon nitride, zirconia, steatite, boron nitride, cordierite, and mullite products. Our components serve critical applications across multiple industries including metal welding, electronic conductors, mechanical assemblies, insulation systems, chemical processing, instrumentation, textiles, nuclear industry, and aerospace.
Custom Manufacturing Capabilities
- Trial production based on drawings or samples: 15 days
- Mass production lead time: 30 days
- Flexible packaging options (carton or PLT)
- Global clientele including Toshiba Lighting Group in Japan and Europe
Our commitment: delivering high-quality ceramic components with rapid turnaround times to meet demanding semiconductor industry requirements.
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Get in Touch
Have questions about our products or want to discuss a custom order? Our team is ready to help you.
Company
Wuxi Special Ceramic Electrical Co.,Ltd
Location
No4 Longshan Road,Xinwu District,Wuxi City,Jiangsu Province
Contact Person
Zhu