5000nm3/H PSA Polysilicon Tail Gas Recycle HCL And Chlorosilane
5000nm3/H PSA Polysilicon Tail Gas Recycle HCL And Chlorosilane
5000nm3/H PSA Polysilicon Tail Gas Recycle
Description:
A number of front-stage distillation and back-stage hydrogen extraction patented technology is adopted, and the technology is coupled, and the HCL and chlorosilane are recovered from polycrystalline silicon exhaust for the whole units. The chlorosilane can be adopted as raw material and the gas purity of products can exceed 99.999%.
Heat exchange unit
Main equipment list
| SN | NAME | QUATITY(SET) | MATERIAL |
| 1 | TSA Adsorption tower | 6 | S30408 |
| 2 | Desorption buffer tank | 1 | S30408 |
| 3 | Preheater | 1 | S30408 |
| 4 | Heat exchanger | 1 | S30408 |
| 5 | High level oil tank | 1 | S30408 |
| 6 | Cooler | 1 | S30408 |
| 7 | Heat transfer oil circulating pump | 1+1 | |
| 8 | Precision filter | 2 |
Performance guarantee
The life guarantee value of adsorbent is 10 years;
The life guarantee value of the valve body is 10 years;
The guaranteed service life of the equipment is 15 years.
The running noise of the device is less than 85dB( 1 m outside the production area)
Specifications:
Scale: 1000 ~ 100000 Nm3/ h
H2 purity: 99.999%
HCL+ Chlorosilane:≤10ppm
Turndown: 30% to 110%
Term:
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