High-Precision 12-Station Automatic Spin Coater for Customizable Semiconductor & Perovskite Film Deposition
Price:
Negotiation
MOQ:
1 set
Delivery Time:
30-45days
Brand:
OSMANUV
Product Description
HIGH-PRECISION 12-STATION AUTOMATIC SPIN COATER FOR SEMICONDUCTOR & PEROVSKITE FILM PREPARATION
Product Overview
This 12-station spin coater is designed for high-throughput thin film deposition, supporting wafers, glass, and flexible substrates. Each station offers independent speed, acceleration, and coating time settings with closed-loop control achieving ±1 rpm accuracy. The number of stations, dispensing method, chamber size, and exhaust system are all customizable, making it ideal for both R&D and pilot production.
Technical Specifications
| Parameter | Value / Range | Customization Option |
|---|---|---|
| Number of stations | 12 | Customizable: 4 / 8 / 12 / 16 stations |
| Speed range | 100 - 10,000 rpm | Extendable to 12,000 rpm |
| Acceleration range | 50 - 10,000 rpm/s | Customizable |
| Speed accuracy | ±1 rpm | - |
| Max substrate size | 150 mm diameter | Customizable up to 200 mm |
| Chamber material | PP / PTFE / 316L stainless steel | Customizable contact materials |
| Environmental control | Exhaust & purge available | Customizable N₂ purge module |
| Program storage | 1000+ recipes | - |
| Power supply | AC 220V / 50Hz | Customizable to 110V / 60Hz |
Applications
- Perovskite solar cell films
- Photoresist coating (semiconductor lithography)
- Sol-gel thin films
- OLED & quantum dot emitting layers
- Biosensor coatings
- Customizable for non-planar or flexible substrates
Customization Options
- System-level and process-level customization
- Number of stations, layout, dispensing path
- Chamber size and material (acid-resistant, solvent-resistant)
- Automatic cleaning & waste solvent recovery system
- Heating / UV / IR post-coating curing modules
- Factory MES/ERP data interface integration
Key Features
- 12 independently driven stations with separate motors & control
- High acceleration response - reaches set speed in <0.5 seconds
- Multi-point dispensing programming - supports dynamic/static dispensing
- Cross-contamination prevention - independent exhaust channels per station
- One-click recipe recall with optional barcode scanning startup
- Customizable safety interlock & e-stop logic
Support and Services
- Global remote support (TeamViewer/VPN)
- On-site installation & training (optional)
- Process consulting - viscosity/speed/thickness modeling
- Local spare parts stock - customizable spare parts kit available
- 18-month warranty (excluding intentional damage)
Packing and Shipping
- Shockproof wooden case (ISTA standard compliant)
- Desiccant & humidity indicator included inside
- Shipping methods: sea / air / land - customizable export labeling & fumigation certificate available
- Lead time: 4 weeks for standard models, 6-8 weeks for customized models
Frequently Asked Questions
Q1: Can it coat 8-inch wafers?
A: Standard max is 150 mm - chamber customizable up to 200 mm.
Q2: Can different stations run different recipes simultaneously?
A: Yes - each station is independently programmable.
Q3: Is N₂ environment coating supported?
A: Full-chamber N₂ purge with oxygen monitoring is customizable.
Related Videos
Get in Touch
Have questions about our products or want to discuss a custom order? Our team is ready to help you.
Company
Dongguan Osmanuv Machinery Equipment Co., Ltd
Location
28 the second industrial, Liu chong wei , Wanjiang ,DongGuan , Guangdong, China
Contact Person
Zhang guoxin