Description MF5000 series mass flow meters

MF5000 series mass flow meters are specially designed for small pipe flow monitoring and control. The series can measure gas flow in a pipe diameter as small as 3 mm,but not over 19 mm. With the self-flow conditioning feature of the MEMS sensor package, the meters feature an extremely low pressure loss compared to the traditional by-pass thermal mass flow meters in this application scope. The accuracy of the meters are generally ±(1.5+0.2FS)% or better depending on the requests. The meters can work at an environment of -20 to 60 C and pressure up to 1.5 MPa. Applications include semiconductor gas process monitoring and control, hospital oxygen gas monitoring, etc.

Specification MF5000 series mass flow meters

Accuracy: ±(1.5+0.5FS)%

Environment Temperature: -20 ~ +60 oC

Humidity: < 95 %RH (No icing or condensation)

Flow channel :3 ~ 19 mm

Display: Flowrate and accumulated flow

Interface:4 ~ 20 mA; RS485; Pulse

Calibration:Air @ 20 oC, 101.325 kPa

Protection: IP40 (Without Ex proof model); IP66 (With Ex proof model)

Ex PrOof: Ex d IIC T4

Detailed Images MF5000 series mass flow meters

Mechanical Dimensions MF5000 series mass flow meters

Model	DN (mm)	D (NPT-M)	L	H	H1	W	d	c
MF5003	3.0	1/8"	118	144	28	38	3	36
MF5006	6.0	1/4"	124	144	28	38	6	36
MF5008	8.0	3/8"	124	151	35	38	8	50
MF5012	12.0	1/2"	150	156	40	40	12	50
MF5019	19.0	3/4"	182.5	156	40	40	19	70

Features of MF5000 series mass flow meters

Highly sensitive, measuring as low as 8 mm/sec, and as high as 65 m/sec with a single assembly
Directly sense mass flow using thermal mass flow principle
Proprietary MEMS sensor package design for better reliability
Standard 12 ~ 24 Vdc power supply
Low pressure loss forreducing energy cost
Industrial standard Modbus protocol for easy networking and remote control

Selection Guide of MF5000 series mass flow meters