Quartz Hemispherical Shell Resonator For Hemispherical Resonator Gyroscope

The hemispherical shell resonator gyroscope is composed of hemispherical resonator, excitation cover and sensitive basement. All of them are made of fused quartz material with high quality factor and metallized on the surface. As the sensitive part of the gyro, the hemispherical shell resonator is the core of the hemispherical resonator gyro. Its machining surface accuracy, position accuracy and surface quality are the most key factors affecting the accuracy and performance of the hemispherical resonator gyro. The higher the machining accuracy of hemispherical resonator, the closer it is to the ideal resonator state, and the higher the gyro accuracy. The hemispherical resonator is made of fused quartz and is a hemispherical thin-walled shell with a central support rod, with a diameter of φ 15 ~ 60mm, wall thickness is generally 0.3-1.1mm, surface accuracy < 0.5um, inner and outer ball concentricity < 0.5um, surface roughness Ra < 0.025um, and quality factor Q value is higher than 107. The special-shaped spherical hemispherical resonator has high surface accuracy and concentricity of inner and outer spheres, and the accuracy reaches sub micron level.

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