High Purity Fused Silica Quartz Boat Custom Glass Parts Integral Forming For Semiconductor Annealing Tray
Product Overview
The High Purity Fused Silica Quartz Boat is a precision-formed high-temperature carrier engineered for tube furnace sintering, semiconductor processing, and laboratory thermal applications. Manufactured through integral hot-forming for uniform wall thickness and fine-polished surfaces, it delivers outstanding thermal stability up to 1100°C, superior chemical resistance to hydrofluoric acid and concentrated corrosive reagents, and zero impurity precipitation — ensuring contamination-free processing for the most demanding industrial and research environments.
Key Features
- Integral Hot-Forming: One-piece construction ensures uniform wall thickness, structural integrity, and eliminates weak joints or seams
- 1100°C High Temperature Resistance: Maintains dimensional stability and mechanical strength under prolonged high-temperature operation in tube furnaces
- HF & Strong Chemical Resistance: Outstanding chemical durability against hydrofluoric acid, concentrated acids, strong alkalis, and organic solvents
- Excellent Thermal Shock Stability: Low thermal expansion coefficient (CTE 5.5 x 10^-7/°C) prevents cracking during rapid heating-cooling cycles
- Zero Impurity Precipitation: SiO2 > 99.99% purity guarantees no metal ion leaching, protecting wafer and sample integrity
- Precision Finish: Surface fine-polished with standardized dimensions, smooth edges, and no chipping for safe sample handling
Applications
| Industry | Application |
|---|---|
| Tube Furnace Sintering | Carrier for high-temperature calcination of powders, wafers, and ceramic substrates in controlled-atmosphere tube furnaces |
| Semiconductor Processing | Wafer annealing and pre-coating high-temperature pretreatment tray ensuring ultra-clean, contamination-free conditions |
| Laboratory Testing | Ashing experiment and corrosive immersion sample container for analytical chemistry and materials characterization |
| New Material R&D | Powder synthesis and precursor heat treatment vessel for advanced material development |
Competitive Advantages
vs. Borosilicate Glass Boat: Borosilicate glass cannot withstand hydrofluoric acid and softens at high temperatures; this quartz boat resists strong corrosion and maintains mechanical integrity through repeated 1100°C thermal cycling without deformation or cracking
vs. Alumina/Ceramic Boat: Superior thermal shock resistance enables rapid heating-cooling; transparent wall allows visual process monitoring; zero metal impurity eliminates wafer and sample contamination risk
Specifications
| Parameter | Value |
|---|---|
| Material | High Purity Fused Silica (SiO2 > 99.99%) |
| Forming Process | Integral Hot-Forming |
| Max Operating Temperature | 1100°C |
| Chemical Resistance | HF, Strong Acid & Alkali, Organic Solvents |
| Thermal Expansion | CTE 5.5 x 10^-7 /°C (Low) |
| Surface Finish | Fine-Polished, Smooth Edges |
| Purity | No Metal Ion Precipitation |
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