C Type CVD Ferrofluidic Feedthrough Magnetic Fluid Vacuum
C type Magnetic fluid vacuum sealing parts for CVD
Application for magnetic fluid seal
- wafer growing equipment
- semiconductor process equipment(Epitaxy,diffusion,CVD,PVD,implantation ect)
- LCD process equipment Solar cell Vacuum Robot
———The principle of Magnetic sealing
A frroluid can behave as a liquid 0-ring where a rotating shaft enters either a low- or high-pressure chamber. The ferrofluid is held in place bypermanent magnets and forms a tight seal, eliminating most of the friction produced in a traditional mechanical seal .
——— Equipment show
We have three-coordinate measuring laboratory, can carry out all kinds of precision testing, to ensure product quality
We have high precision CNC to ensure the quality and precision of products
———Equipment list
| Name | Type | Quantity | Processing range | Precision(um) |
| CNC | MAZAK(QTN350L) | 1 | φ720*1250 | 3 |
| CNC | MAZAK(QTN250L) | 1 | φ580*1500 | 3 |
| Turn milling center | MAZAK(QTN250M) | 2 | φ580*600 | 3 |
| CNC | Newway(NL-634SC) | 1 | φ630*1000 | 5 |
| CNC | FUJI(TN-36) | 2 | φ350*290 | 3 |
| CNC | HAAS SL30 | 1 | φ620*750 | 3 |
| CNC | MAZAK FJV200 | 1 | 560X*410Y*560Z | 3 |
| CNC | LGMAZAK NEXUS160AN-2PC | 1 | 560X*410Y*660Z | 10 |
| CNC | WHEELEL | 2 | 560X*410Y*660Z | 5 |
| Welding | Miller | 1 |
———Material list we can deal
Stainless steel :304/1.4307 316/1.4404 321/1.4541 316Ti/1.4571 317L 904L F44 NO6625 UNS718
440A/B/C 431 446 F6a F11 F22 F91
Duplex steel : F51 F60 F53 F55
Aluminum : 6061 6063 7075 5052
———Our career
We have established close cooperation with many famous enterprises at home and abroad
Get in Touch
Have questions about our products or want to discuss a custom order? Our team is ready to help you.