CE Certificated Vacuum Helium Leak Detector Machine For Semiconductor Industry
Vacuum Gas Leak Detection Helium Leak Detector Machine for Industrial Refrigeration
Introduction of Helium Leak Detector
SFJ-16M is a modular helium mass spectrometer leak detector with light modular structure design. It is suitable for low-pressure and high-pressure detection, which can be used for low-pressure detection in vacuum or local high-pressure detection by using sniffing line.
Product Parameters
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SFJ-16M Helium Leak Detector |
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Performance Indicators |
Minimum detectable leak rate |
Vacuum Mode (ULTRA):5.0×10-13 Pa·m3/s (helium pumping speed >5 l/s) |
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Minimum detectable leak rate |
5.0×10-8 Pa·m3/s |
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Response time(s) |
<1 |
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Startup time(min) |
≤95s |
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Leakage detection range |
5.0×10-13~1.0×10-3 Pa·m3/s |
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Leakage rate display range |
1.0×10-13~1.0×10-3 Pa·m3/s |
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Maximum allowable leak detection pressure(Pa) |
1500 |
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Detectable quality |
2,3,4(H2 , He3, He4) |
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Basic Configuration |
Man-machine interface |
5 "color LCD Touch Screen |
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Ion source |
2pcs, iridium coated yttrium oxide, automatic switching |
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I/O Input/output interface |
Eight inputs and eight outputs |
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Communication interface |
RS232/485,LAN |
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MES interface |
Standard |
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Physical size of instrument |
592 * 498 * 370mm |
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Specifications of leak detection port |
DN16 KF/2pcs |
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Power Supply |
DC24V |
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Operating temperature |
0-40ºC |
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Power |
240W |
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Display language |
Both Chinese and English |
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Leakage rate display |
Figure, bar chart, curve chart |
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Performance of Helium Leak Detector
1.. Realize the diversity of communication through various analog and digital interfaces;
2. Short starting time, fast signal response and clearing speed;
3. High reliable leak detection efficiency;
4. Intelligent fault prompt and alarm function.
Application of Helium Leak Detector
Electricity,
Refrigeration,
Lithium battery
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