Vacuum Chamber Helium Leak Detector System for Semiconductor Components/Seals

Introductionb of Helium Leak Detector System

It is used for leak detection of electronic components/seals. The solution consists of a pressure helium tank, a leak detection tank and a helium mass spectrometer leak detector.

Features of Helium Leak Detector System

1. The unique gas circuit design improves the pumping speed of helium, shortens the background time of helium cleaning and effectively prevents helium pollution;

2. The minimum detectable leak rate is low, the sensitivity is high and the detection range can be up to Level 12;

3. Intelligent fault indication and alarm functions.

Composition of Helium Leak Detector System

The solution is composed of a pressure helium tank, a leak detection tank and a helium mass spectrometer leak detector. The electronic components or seals are placed into the pressure helium tank, the helium gas of the specified concentration

Product Application

Semiconductor industry, components/seals