FS5001-50-EV-A MEMS Mass Flow Sensors High Flow Fast Respond

This serial of mass flow sensors are designed with manifold installation configuration for gas mass flow measurement utilizing the Company's proprietary MEMS sensing technology. Instrumentation and automation are two targeted applications.

Features
Designed for manifold installation
Fast response time,customizable to 10 msec
Laminar flow in full dynamic range
Both analog and digital interface
Large turn-down ration over 100:1
High/low flow applications

Applications
Laboratoryflow measurement
GC mass spectrometers
Leakage detection
Instrumentation
Process monitor with dry gases
Automation