1400C CVD Vacuum Atmosphere Box Furnace With Water Cooling System
1400℃ CVD Vacuum Atmosphere Furnace With Water Cooling System
1﹑Atmosphere Box Furnace
The 1400°C vacuum atmosphere furnace uses high-quality silicon carbide rods as the heating element, adopts a double-layer shell structure and a 30-stage program temperature control system, phase-shift trigger, and silicon controlled silicon control. There is an air cooling system between the double-layer furnace shells of the furnace, which can quickly raise and lower the temperature. The shell is sealed as a whole, the cover plate is sealed with silica gel mud, the furnace door is equipped with a water cooling system and a silica gel pad. The furnace has the advantages of balanced temperature field, low surface temperature, fast temperature rise and fall, and energy saving. It is specially developed for high-temperature atmosphere sintering, atmosphere reduction, CVD experiments, vacuum annealing, melting, and analysis in universities, scientific research institutes, and industrial and mining enterprises.
2﹑Technical specification
| Model No. | KSF-4-14Q | KSF-5-14Q | KSF-12-14Q | KSF-18-14Q |
| Chamber size | 200*150*150 | 300*200*200 | 400*300*300 | 500*400*400 |
| Power | 4KW | 5KW | 12KW | 18KW |
| Working voltage | 220V | 220V | 380V | 380V |
| Heating element | High Purity Silicon Carbon Rod | |||
| Working Temperature | 1300°C | |||
| Max Temperature | 1400C | |||
| Heating rate | 20C/min | |||
| Vacuum degree | MAX vacuum degree:<-0.08Mpa; Working vacuum degree:-0.02Mpa | |||
3﹑Patent
With proven engineering knowledge and more than 20 years' experience we can provide you the right furnace solution.
4﹑Customer Case in China
The first All-solid-state battery pilot production line in china
The first Mobile phone fast charging graphene heat dissipation film carbonization production line in china
The first ITO target powder roller furnace continuous production line in china
The first Hydrogen fuel cell industrial production line in china
5﹑Foreign Customer
6﹑Package and shipment
We will well pack the goods based on the kinds of furnace and customer's requirement.
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