Low Noise High Precision Linear Voice Coil Motors Planar Motors For Semiconductor Equipment

Product Description:

Linear Voice Coil Motors Planar motors are constructed with three main parts: a coil, a permanent magnet, and a yoke. When the permanent magnet is energized, the coil pusher is subjected to an amperometric force that produces motion perpendicular to the direction of the coil plane. By controlling the direction and magnitude of the coil current, the direction of motion of the coil and the amount of thrust applied can be precisely controlled. This type of control allows the Flat Plate Voice Coil Motor to achieve linear or circular motion to meet the needs of different applications.
The fast response speed of linear voice coil motors can meet the requirements of high-frequency and high-precision motion control. In addition, their simple structure and small size make installation and maintenance easier. With the same dimensions, the flat plate voice coil motor series has a shorter stroke than the rectangular voice coil motor series, but has the advantage of a lower surface height. Thrusts of up to 500N and strokes of up to 15mm are possible.

The application of linear voice coil actuators in semiconductor equipment is mainly in high-speed and high-precision motion control. In the semiconductor manufacturing and packaging process, the plane voice coil motor is widely used in a variety of equipment because of its fast response speed and high precision characteristics. Flat voice coil motors are used in lead bonding machines, dispensers, photolithography, PCB drilling, wafer pick and place, and component inspection equipment. These applications require equipment that can accurately control the position and motion of small parts. These high accuracy and speed requirements can be met using linear voice coil actuators, thereby improving the efficiency and product quality of semiconductor manufacturing and packaging processes.
Ideal for generating short-stroke X-Y motions, the planar series is sold primarily to the semiconductor and micro-machine tool industries. Modular design, customizable.

Features:

The actuator coil is lightweight, with short response time and high frequency.
Short stroke, compact structure.
Stroke 1mm-20mm
Peak thrust 1N-500N

Product Parameters:

Applications:

The VCAP series Planer Actuators have a lower stroke length per size than Rectangular,But they also have a lower height profile .Forces range up to 500N and strokers to 15mmThe VCAP series Planer Actuator are the ideal solution for very small stroke X-Y Axis movements and their major market is in the semiconductor and micro machine tool industries.