High Speed Rectangular Voice Coil Motor Linear Motor Actuator For Semiconductor Industry
Product Description:
The VCAS series Rectangular Actuators have a lower force per weight than the Cylindrical Actuators.But they also have a much longer strokes Forces range up to 1000N and 250mm.The VCAS series Rectangular Actuator are the ideal solution for X-Y Axis movements and their major market is in the semiconductor and micro machine tool industries.
Rectangular voice coil motors are used in the field of semiconductor equipment:
Dispenser:In the semiconductor packaging process, the dispenser needs to accurately control the position and amount of glue dispensed. Voice coil motors can precisely control the movement of the dispensing head to achieve high-precision dispensing operations and ensure the quality of semiconductor chip packaging.
Wire Bonding Machine: Used to connect the pins on the chip with the pins on the package substrate, it requires high positioning accuracy and movement speed. Voice coil motors provide fast and precise motion control to ensure the quality and efficiency of lead bonding.
PCB Drilling Machines: Drilling operations are required during the manufacturing process of printed circuit boards. Voice coil motors can control the motion of the drilling head to achieve high-precision drilling and improve the processing accuracy and quality of PCBs.
Photolithography: Photolithography is one of the core equipments for semiconductor manufacturing, which requires high precision and speed of motion control. Voice coil motors are used to control the motion of the mask table and wafer table in the lithography machine to ensure the precision and efficiency of lithography.
Wafer pick and place: In the production process of semiconductor wafers, it is necessary to pick and place wafers. Voice coil motors can provide precise motion control to ensure safe and accurate pick and place of wafers and improve production efficiency.
Features:
Lightweight and high quality actuator coil, short speed response time and high frequency.
Long stroke, effective stroke 1mm-200mm.
High thrust, peak thrust 1N-800N.
Commonly used for making x-y axis motion platform.
Product Parameter:
| Product Model | Peak Force (N) |
Continuous Force at 25℃(N) |
Total Stroke (mm) |
Max Voltage (V) |
Back EMF Constant (V/m/s) |
Weight of the coil (g) |
Length (mm) |
Width (mm) |
Height (mm) |
| VCAS0002-0498-00A | 2.1 | 1.3 | 50 | 11.3 | 1.3 | 15 | 72 | 42.6 | 33 |
| VCAS0002-0747-00A | 2.1 | 1.3 | 74.7 | 11.3 | 1.3 | 15 | 100.5 | 42.6 | 37 |
| VCAS0006-0030-00A | 6.1 | 3.2 | 3 | 13.3 | 4.6 | 18.2 | 25.1 | 34.1 | 27 |
| VCAS0006-0099-00A | 6.1 | 3.2 | 10 | 13.7 | 4.6 | 18.2 | 33.5 | 34.1 | 26.9 |
| VCAS0013-0343-00A | 13 | 8 | 34.3 | 12.6 | 5.8 | 40 | 68.3 | 60 | 34.8 |
| VCAS0065-1000-00A | 65 | 22.4 | 100 | 28.7 | 9.7 | 135 | 170 | 59.6 | 81.9 |
Product Applications:
The main application of a voice coil motor:
1.Semiconductor industry:Writting,cutting,drilling,transportation systems,welding,robotics.
2.Valve operation in the field:Type metering valves,pressure test systems,pneumatic valve chemistry injection system.
3.Micro machine industry:Feed systems,micro drilling,precision stamping.
4.Vibration system:Shaking table,vibration platform.
5.Medical filed:Micro-injection system,respiratory equipment,testing equipment.
6.Aviation Technology:Flight control system,pilot feedback system.
7.Commercial use field:Computer cooling pump miniature camera auto focus system.
8.Automation industry:Laser equipment,dispenser,test equipment,textile machinery.
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