High Response Precision Linear Voice Coil Motor For Semiconductor Micro Motion Control
Product Description:
In semiconductor manufacturing processes such as wafer processing, lithography, inspection, and packaging, micro-positioning control requires extremely high accuracy, fast response, and long-term stability. Linear Voice Coil Motors, featuring direct-drive operation and excellent dynamic performance, have become an ideal actuation solution for micro-displacement control in semiconductor equipment.
Linear Voice Coil Motors generate thrust directly through electromagnetic force, enabling frictionless, backlash-free linear motion with micrometer-level or even nanometer-level positioning resolution. Compared with traditional lead screw or servo-driven mechanisms, Linear voice coil motors offer superior positioning accuracy and repeatability within short stroke ranges. They are particularly well suited for wafer alignment, optical focusing, probe contact control, and precision positioning stages.
In high-speed scanning and dynamic compensation applications, linear voice coil motors deliver high acceleration and high-frequency response, allowing precise tracking of control commands and effective compensation for system errors and environmental disturbances. Their smooth, low-vibration motion helps minimize process disturbances in micro-structure fabrication and ensures stable process performance.
Features:
- Sub-micron or nanometer-level displacement resolution
- High-speed, high-bandwidth dynamic response
- Exceptional repeatability and long-term stability
- Zero backlash, low vibration, and particle-free motion
- Compatibility with ISO 4–5 cleanroom environments
- No lead screws, gears, or backlash
- No hysteresis in displacement response
- High control bandwidth for closed-loop position, velocity, and force control
- Extremely low vibration and acoustic noise
Product Parameters:
| Product Model | Peak Force (N) |
Continuous Force at 25℃(N) |
Total Stroke (mm) |
Max Voltage (V) |
Back EMF Constant (V/m/s) |
Weight of the coil (g) |
Stator Diameter | Shaft end thread (mm) |
| VCAB0005-0039-00A | 5 | 1.5 | 3 | 5.4 | 0.9 | 23 | 29.5 | M2(Outer) |
| VCAB0005-0050-00A | 5 | 2.2 | 3.9 | 14.5 | 3.1 | 27 | 31.5 | M2.5(Outer) |
| VCAB0013-0072-00A | 13 | 4.2 | 7.2 | 26.6 | 5.72 | 16.2 | 26.2 | M3(Outer) |
| VCAB0015-0062-00A | 15 | 6.5 | 6.2 | 26.2 | 9.75 | 14.8 | 33 | M3(Outer) |
| VCAB0015-0127-00A | 15 | 4.9 | 12.7 | 21.5 | 4.1 | 12.5 | 30.5 | Shaft ∮4.8 |
| VCAB0022-0098-00A | 22 | 6.6 | 9.8 | 24.7 | 5.8 | 20 | 34.1 | M3(Outer) |
| VCAB0022-0448-00A | 22 | 11.4 | 44.8 | 14.3 | 4 | 52 | 48 | M3(Inner) |
| VCAB0032-0050-00A | 32 | 8.9 | 5 | 29.3 | 7.1 | 48 | 40 | M3(Inner) |
| VCAB0033-0099-00A | 33 | 8 | 9.9 | 24.3 | 5.87 | 23.5 | 36 | M3(Outer) |
| VCAB0033-0224-00A | 33 | 13.5 | 22.4 | 26.7 | 6.8 | 69 | 58 | M3(Inner) |
| VCAB0035-0105-00A | 35 | 15.6 | 10.5 | 11.9 | 5 | 91 | 50 | M3(Inner) |
| VCAB0044-0040-00A | 44 | 16.3 | 4 | 18.3 | 8.9 | 46.5 | 53 | M3(Inner) |
| VCAB0044-0059-00A | 44.1 | 17.7 | 5.9 | 14.3 | 8 | 43 | 46 | M3(Inner) |
| VCAB0044-0075-00A | 44 | 13.7 | 7.5 | 16.8 | 7.6 | 38.6 | 31.1 | M3(Outer) |
| VCAB0044-0249-00A | 44 | 11.7 | 24.9 | 44.9 | 8.88 | 65.9 | 38.1 | M3(Inner) |
| VCAB0070-0149-00A | 70 | 27.3 | 14.9 | 26.9 | 17.7 | 79 | 43 | M3(Inner) |
| VCAB0087-0062-00A | 87 | 21.67 | 6.2 | 34.5 | 12.7 | 45.2 | 43.1 | M3(Inner) |
| VCAB0087-0563-00A | 87 | 17.5 | 56.3 | 63.4 | 8.1 | 177 | 72 | shaft ∮10 |
| VCAB0088-0191-00A | 88.5 | 23.2 | 19.1 | 29.9 | 8 | 162 | 50.8 | M3(Inner) |
| VCAB0105-0164-00A | 105 | 35.4 | 16.1 | 20.1 | 11.5 | 150 | 60.4 | M3(Inner) |
| VCAB0113-0089-00A | 113 | 35 | 8.9 | 31 | 17.5 | 125 | 73 | shaft ∮8 |
| VCAB0262-0112-00A | 262 | 111 | 11.2 | 35.1 | 41 | 285 | 71 | shaft ∮10 |
| VCAB0262-0249-00A | 262 | 112 | 24.9 | 28.2 | 26 | 785 | 66 | shaft ∮8 |
| VCAB0294-0498-00A | 294 | 56.8 | 49.8 | 114 | 24.5 | 685 | 93 | shaft ∮10 |
| VCAB0436-0187-00A | 436 | 147.6 | 18.7 | 40.7 | 40.7 | 648 | 80.4 | shaft ∮10 |
| VCAB0436-0250-00A | 436 | 167 | 25 | 31.6 | 37.2 | 775 | 78.4 | shaft ∮10 |
| VCAB0445-0300-00A | 445 | 185 | 30 | 33 | 35 | 920 | 76.2 | shaft ∮10 |
Applications:
- Wafer alignment and positioning stages
- Lithography focus and height compensation
- Probe station Z-axis and contact control
- AOI / AVI high-speed scanning actuators
- Die bonding and packaging micro-assembly
- Precision dispensing and micro-dosing systems
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