High Precision Micro Rotary Voice Coil Motor For Wafer Inspection And Measurement

In wafer inspection and metrology equipment, the rotary voice coil motor is the core driving component for achieving precise scanning inspection. Leveraging its high bandwidth and high-precision direct-drive characteristics, it can drive inspection probes or optical lenses to perform high-frequency, small-angle rotational scans around the wafer surface. Coupled with algorithm optimization from specialized motion controllers, this enables nanometer-level defect identification and accurate measurement. The rotary voice coil motor's design without mechanical transmission eliminates backlash errors, effectively suppresses vibration interference, and ensures the precise capture of nanoscale defects during wafer defect inspection and circuit pattern scanning. It also meets the rotational movement requirements of three-degree-of-freedom wafer adjustment platforms, enabling fine angular adjustments along the θx/θy axes, providing reliable support for yield control in semiconductor manufacturing processes.