High Speed High Precision Vibration Motors For Semiconductor Equipment
Product Description:
The SUPTMOTION VCAZ Series Voice Coil Actuator is a high-performance axial linear motor designed for applications requiring high precision, fast response, and compact integration. Based on advanced electromagnetic drive technology, the VCAZ Series delivers direct-drive linear motion without mechanical transmission components, ensuring exceptional positioning accuracy and smooth dynamic performance.
With its high frequency response, high speed, small size, and long service life, the VCAZ Series actuator is ideal for precision automation systems, laser processing equipment, semiconductor manufacturing, optical alignment, and high-speed inspection platforms.
The SUPTMOTION VCAZ Series High Precision Voice Coil Actuator is designed for advanced semiconductor equipment that requires ultra-precise positioning and fast dynamic response. Featuring a direct-drive axial electromagnetic structure, this actuator delivers smooth motion, high accuracy, and zero backlash.
With high frequency response, compact size, and long service life, the VCAZ Series is ideal for wafer positioning systems, semiconductor inspection platforms, and micro-motion stages.
Features:
Ultra-high positioning accuracy
High dynamic response for precision motion
Compact and lightweight design
Zero backlash direct drive system
Long operating life with minimal maintenance
Smooth and stable motion control
Suitable for cleanroom environments
Product Parameters:
| Model Number | VCAZ0010-0020-00A | |||
| Coil parameters | Tolerance | Symbol | Value | Unit |
| DCR | ±10% | R | 9.5 | Ω |
| Peak Voltage | standard value | Vp | 14.8 | V |
| Maximum current | standard value | Ip | 1.6 | A |
| Force constant | ±7.5% | KF | 2.7 | N/A |
| Back EMF constant | standard value | KD | 2.7 | V/M/Sec |
| Inductance | ±30% | L | 0.37 | mH |
| Actuator paramters | Symbol | Value | Unit | |
| Peak force | Fp | 4.2 | N | |
| Continuous stall force | Fc | 2.2 | N | |
| Actuator coonstant | Ka | 0.87 | N//W | |
| Electrical time constant | Te | 0.04 | milli-sec | |
| Pmax | Pp | 24 | W | |
| Stroke | S | 1.5 | mm | |
| Clearance of each side of coil | CL | 0.8 | mm | |
| Thermal resistance | Oth | 20 | ℃/W | |
| Maximum coi temp allowed | Tmax | 150 | ℃ | |
| Weight of coil | WTc | 13 | g | |
| Weight of magnet steel | WTE | 56 | g | |
| Weight of Actuator | WTa | 69 | g | |
Applications:
The SUPTMOTION VCAZ Series Voice Coil Actuator is widely used in high-precision and high-speed automation systems, including:
Laser Processing Equipment
Laser cutting head Z-axis control
Laser focusing systems
Laser marking and engraving equipment
Semiconductor Manufacturing
Wafer positioning systems
Precision alignment equipment
Chip inspection and handling systems
Optical and Photonics Systems
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