KF50 High Vacuum Butterfly Valve FKM Sealant For Laboratory Semiconductor

KF50 High Vacuum Butterfly Valve FKM Sealant For Laboratory And Semiconductor

1. Description:

The vacuum butterfly valve is designed specifically for high and medium vacuum systems, using ISO-KF flange connections to ensure excellent sealing performance and fast opening and closing function. Suitable for clean and harsh environments such as semiconductors, photovoltaics, vacuum coating, and scientific research instruments, providing multiple driving modes including manual, pneumatic, and electric to meet different automation needs

2. Specification:

3. Features:

• High vacuum compatibility: Suitable for pressure range of 10 ⁻⁴ Pa~0.1 MPa, with a leakage rate as low as ≤ 1 × 10 ⁻⁶ Pa · m ³/s. 
• Standardized flange: KF50 (DN50) interface, compatible with ISO-KF/NW50 flanges, easy to install.   
• Corrosion resistant material: The valve body is made of SS316 stainless steel, and the sealing can be selected from FKM or metal sealing (suitable for ultra-high vacuum).   
• Multiple driving modes: supports manual handle, pneumatic actuator (0.4~0.6MPa air source), and electric actuator (24VDC/220VAC).
•  Zero leakage design
  -The precision machined valve plate and elastic sealing structure ensure the airtightness of the ultra-high vacuum system.  
• Long lifespan and durability
  -SS316 stainless steel valve body+anti-aging seal, suitable for corrosive gases (such as Cl ₂, O ₂).  
• Quick response
  -Pneumatic opening and closing time<1 second * *, electric type supports 4-20mA signal control, seamlessly connected to PLC system.   
• Easy maintenance
  -Modular design, sealing ring can be quickly replaced, reducing downtime