Depositing tungsten metal films Semiconductor application Gas Tungsten Hexafluoride
Product Description
Tungsten hexafluoride gas, often abbreviated as WF6, is a chemical compound composed of tungsten (W) and fluorine (F). It is a colorless, corrosive, and highly reactive gas. Here are some key points about tungsten hexafluoride gas:
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Chemical Formula and Structure: Tungsten hexafluoride has the chemical formula WF6. It consists of one tungsten atom bonded to six fluorine atoms, forming an octahedral molecular geometry.
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Physical Properties: Tungsten hexafluoride is a dense gas with a molecular weight of 297.84 g/mol. It has a boiling point of approximately 17.1°C (62.8°F) and is typically stored and handled in its liquid form under controlled conditions.
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Reactivity: WF6 is highly reactive and readily reacts with a variety of substances. It reacts vigorously with water, moisture, and oxygen, releasing toxic hydrogen fluoride (HF) gas. Due to its reactivity, WF6 is commonly used as a fluorine source in various chemical processes.
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Applications: Tungsten hexafluoride gas has several industrial applications, including:
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Semiconductor Industry: WF6 is used as a precursor in the production of tungsten films or layers in semiconductor manufacturing processes, such as chemical vapor deposition (CVD) and atomic layer deposition (ALD). It serves as a source of tungsten for depositing thin films on integrated circuits and other electronic devices.
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Metal-Organic Chemical Vapor Deposition (MOCVD): WF6 is utilized in MOCVD processes to deposit tungsten films in the production of high-brightness light-emitting diodes (LEDs) and other optoelectronic devices.
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Surface Treatment: WF6 is employed in surface treatment applications, such as etching and cleaning of metals, ceramics, and glass surfaces.
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Research and Development: Tungsten hexafluoride gas is sometimes used in research laboratories as a source of tungsten or as a fluorine-containing reagent in various chemical reactions.
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Safety Considerations: Tungsten hexafluoride is a toxic and corrosive gas. It reacts with moisture in the air to produce hydrogen fluoride, which is highly corrosive and can cause severe burns. Proper handling, storage, and disposal procedures, along with the use of appropriate personal protective equipment, are essential to ensure worker safety.
It is important to note that the specific applications, handling procedures, and safety considerations for tungsten hexafluoride gas may vary depending on the industry and intended use. It is recommended to consult relevant safety guidelines, regulations, and the material safety data sheet (MSDS) provided by the manufacturer for comprehensive information on the safe handling and usage of WF6.
Basic Info.
| Model NO. | WF6 | Transport Package | Cylinder |
| Specification | 10L/15kg | Trademark | CMC |
| Origin | Suzhou, China | HS Code | 2812190091 |
| Production Capacity | 200t/Year |
Product Spec:
ungsten Hexafluoride WF6 GAS
CAS No.: 7783-82-6
EINECS No.: 232-029-1
UN No.: UN2196
Purity: 99.999%
Dot Class: 2.3
Appearance: Colorless
Grade Standard: Electron Grade,Industrial Grade
The COA of Product:
| Test items | Units | Quality requirements | Test results |
| CF4 | ppm | <0.5 | <0.01 |
| O2 | ppm | <0.5 | <0.01 |
| N2 | ppm | <1 | 0.03 |
| CO | ppm | <0.5 | <0.02 |
| CO2 | ppm | <0.5 | <0.01 |
| SiF4 | ppm | <0.5 | <0.1 |
| SF6 | ppm | <0.5 | <0.1 |
| HF | ppm | <5 | 0.19 |
| Al | ppb | ≤10 | <0.020 |
| As | ppb | ≤10 | <0.001 |
| B | ppb | ≤10 | <0.005 |
| Ca | ppb | ≤5 | <0.200 |
| Cd | ppb | ≤2 | <0.001 |
| Cr | ppb | ≤10 | <0.020 |
| Fe | ppb | ≤10 | <0.007 |
| K | ppb | ≤5 | <0.100 |
| Mn | ppb | ≤10 | <0.001 |
| Na | ppb | ≤5 | <0.040 |
| Th | ppb | ≤0.1 | <0.001 |
| Ti | ppb | ≤10 | <0.002 |
| Li | ppb | ≤10 | <0.002 |
| U | ppb | ≤0.05 | <0.001 |
| Zn | ppb | ≤10 | <0.005 |
| Si | ppb | ≤10 | <0.100 |
| Pb | ppb | ≤10 | <0.001 |
| P | ppb | ≤2 | <0.300 |
| Mg | ppb | ≤10 | <0.020 |
| Ni | ppb | ≤20 | <0.030 |
| Cu | ppb | ≤5 | <0.005 |
| Mo | ppb | ≤10 | <0.001 |
| Total impurities of other metal | ppb | ≤500 |
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