Semiconductor Manufacturing Cylinder Gas Tungsten Hexafluoride
Product Description
WF6 refers to tungsten hexafluoride, which is a chemical compound composed of one tungsten atom bonded to six fluorine atoms. Here are some key points about WF6:
- Chemical Formula: WF6
- Molecular Weight: 297.85 g/mol
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Structure:tungsten hexafluoride has an octahedral molecular geometry, with the tungsten atom at the center and six fluorine atoms arranged around it.
- Physical Properties: Tungsten hexafluoride is a yellowish-green gas at room temperature. It has a strong, pungent odor and is highly reactive.
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Chemical Reactivity: Tungsten hexafluoride is a highly reactive compound, especially with water and moisture. It hydrolyzes rapidly in the presence of water, releasing hydrofluoric acid (HF) and tungstic acid (H2WO4). The hydrofluoric acid produced is highly corrosive and toxic.
- Uses: Tungsten hexafluoride is primarily used in the semiconductor industry as a precursor for deposition of tungsten films during the fabrication of integrated circuits. It is also used in the production of tungsten metal and other tungsten compounds.
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Safety Considerations: Tungsten hexafluoride is a hazardous compound due to its reactivity and the production of hydrofluoric acid upon contact with water or moisture. It is corrosive to many materials and can cause severe burns and tissue damage upon skin contact. Special care must be taken when handling, storing, and transporting WF6, and appropriate safety protocols must be followed.
- Environmental Impact: Tungsten hexafluoride is not considered a significant environmental pollutant. However, its hydrolysis products, such as hydrofluoric acid, can be harmful to the environment and must be handled and disposed of properly.
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Regulations: The use and handling of tungsten hexafluoride are subject to regulations and safety protocols to ensure the protection of workers and the environment. Regulatory bodies provide guidelines for the safe handling and disposal of WF6 and its byproducts.
Product Spec:
Tungsten Hexafluoride WF6 GAS
CAS No.: 7783-82-6
EINECS No.: 232-029-1
UN No.: UN2196
Purity: 99.999%
Dot Class: 2.3
Appearance: Colorless
Grade Standard: Electron Grade,Industrial Grade
The COA of Product:
| Test items | Units | Quality requirements | Test results |
| CF4 | ppm | <0.5 | <0.01 |
| O2 | ppm | <0.5 | <0.01 |
| N2 | ppm | <1 | 0.03 |
| CO | ppm | <0.5 | <0.02 |
| CO2 | ppm | <0.5 | <0.01 |
| SiF4 | ppm | <0.5 | <0.1 |
| SF6 | ppm | <0.5 | <0.1 |
| HF | ppm | <5 | 0.19 |
| Al | ppb | ≤10 | <0.020 |
| As | ppb | ≤10 | <0.001 |
| B | ppb | ≤10 | <0.005 |
| Ca | ppb | ≤5 | <0.200 |
| Cd | ppb | ≤2 | <0.001 |
| Cr | ppb | ≤10 | <0.020 |
| Fe | ppb | ≤10 | <0.007 |
| K | ppb | ≤5 | <0.100 |
| Mn | ppb | ≤10 | <0.001 |
| Na | ppb | ≤5 | <0.040 |
| Th | ppb | ≤0.1 | <0.001 |
| Ti | ppb | ≤10 | <0.002 |
| Li | ppb | ≤10 | <0.002 |
| U | ppb | ≤0.05 | <0.001 |
| Zn | ppb | ≤10 | <0.005 |
| Si | ppb | ≤10 | <0.100 |
| Pb | ppb | ≤10 | <0.001 |
| P | ppb | ≤2 | <0.300 |
| Mg | ppb | ≤10 | <0.020 |
| Ni | ppb | ≤20 | <0.030 |
| Cu | ppb | ≤5 | <0.005 |
| Mo | ppb | ≤10 | <0.001 |
| Total impurities of other metal | ppb | ≤500 | <0.0010 |
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