Semiconductor Industry Usage Cylinder Gas Wf6 Tungsten Hexafluoride
Price:
US $ 15/PC
MOQ:
1 Piece
Delivery Time:
15 days
Brand:
CMC
Product Description
Product Description
WF6 refers to tungsten hexafluoride, which is a chemical compound composed of one tungsten atom bonded to six fluorine atoms. Here are some key points about WF6:
- Chemical Formula: WF6
- Molecular Weight: 297.84 g/mol
- Structure: Tungsten hexafluoride has an octahedral molecular geometry, with the tungsten atom at the center and six fluorine atoms arranged around it.
- Physical Properties: Tungsten hexafluoride is a colorless, corrosive gas. It has a strong, pungent odor and is highly reactive.
- Chemical Reactivity: WF6 is a highly reactive compound. It readily reacts with water vapor in the air to form tungsten oxide and hydrogen fluoride. It is also reactive with many other substances, including metals, reducing agents, and organic compounds.
- Applications: Tungsten hexafluoride has various applications primarily in the semiconductor industry. It is used as a precursor in the chemical vapor deposition (CVD) process to deposit tungsten films onto semiconductor substrates. These films are essential for the fabrication of thin-film transistors and interconnects in integrated circuits.
- Safety Considerations: Tungsten hexafluoride is a toxic and corrosive substance. It can cause severe burns to the skin, eyes, and respiratory tract upon contact. Inhalation of the gas or its decomposition products can be harmful. Strict safety measures and proper protective equipment should be used when handling and working with WF6.
- Storage and Handling: Due to its reactivity and corrosiveness, tungsten hexafluoride is typically stored and handled in specialized containers made of materials resistant to the corrosive effects of the compound, such as nickel or stainless steel.
- Environmental Impact: Tungsten hexafluoride is not considered a significant environmental hazard. However, its use and disposal should be in accordance with local regulations and best practices to minimize any potential impact.
Product Spec:
Tungsten Hexafluoride WF6 GAS
CAS No.: 7783-82-6
EINECS No.: 232-029-1
UN No.: UN2196
Purity: 99.999%
Dot Class: 2.3
Appearance: Colorless
Grade Standard: Electron Grade,Industrial Grade
The COA of Product:
| Test items | Units | Quality requirements | Test results |
| CF4 | ppm | <0.5 | <0.01 |
| O2 | ppm | <0.5 | <0.01 |
| N2 | ppm | <1 | 0.03 |
| CO | ppm | <0.5 | <0.02 |
| CO2 | ppm | <0.5 | <0.01 |
| SiF4 | ppm | <0.5 | <0.1 |
| SF6 | ppm | <0.5 | <0.1 |
| HF | ppm | <5 | 0.19 |
| Al | ppb | ≤10 | <0.020 |
| As | ppb | ≤10 | <0.001 |
| B | ppb | ≤10 | <0.005 |
| Ca | ppb | ≤5 | <0.200 |
| Cd | ppb | ≤2 | <0.001 |
| Cr | ppb | ≤10 | <0.020 |
| Fe | ppb | ≤10 | <0.007 |
| K | ppb | ≤5 | <0.100 |
| Mn | ppb | ≤10 | <0.001 |
| Na | ppb | ≤5 | <0.040 |
| Th | ppb | ≤0.1 | <0.001 |
| Ti | ppb | ≤10 | <0.002 |
| Li | ppb | ≤10 | <0.002 |
| U | ppb | ≤0.05 | <0.001 |
| Zn | ppb | ≤10 | <0.005 |
| Si | ppb | ≤10 | <0.100 |
| Pb | ppb | ≤10 | <0.001 |
| P | ppb | ≤2 | <0.300 |
| Mg | ppb | ≤10 | <0.020 |
| Ni | ppb | ≤20 | <0.030 |
| Cu | ppb | ≤5 | <0.005 |
| Mo | ppb | ≤10 | <0.001 |
| Total impurities of other metal | ppb | ≤500 | <0.0010 |
Detailed Photos
Shanghai Kemike Chemical Co., Ltd is staffed by trained personnel, combine many years experience in Gas industry .We supply cylinder gas, electronic gas, etc ., and the gas holder, panel, valves and fittings and other equipment, parts and engineering services to our customers in China and worldwide; The products are involved in various industrial fields, such as semiconductor chip, solar cell, LED, TFT-LCD, optical fiber, glass, laser, medicine , etc., Our mission is to partner with our global customers to provide support, solutions and quality products that are innovative,reliable, and safe.
Our products mainly include: H2, O2, N2, Ar, CO2, propane, acetylene, helium, laser mixed gas, SiH4, Sih2cl2, SiHCL3, SiCL4, NH3, CF4, NF3, SF6, HCL, N2O, doping mixed gas (TMB, PH3, B2H6) and other electronic gases.
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Company
Shanghai Kemike Chemical Co.,Ltd
Contact Person
William