Metal Organic Chemical Vapor Deposition (MOCVD) Cylinder Gas Tungsten Hexafluoride
Price:
US $ 15/PC
MOQ:
1 Piece
Delivery Time:
15 days
Brand:
CMC
Product Description
Product Description
Tungsten hexafluoride (WF6) is a chemical compound composed of one tungsten atom bonded to six fluorine atoms. It is a volatile, colorless gas at room temperature and atmospheric pressure. WF6 is known for its strong oxidizing properties and is primarily used in the semiconductor industry for chemical vapor deposition (CVD) processes.
Here are a few key points about tungsten hexafluoride gas:
- Chemical Formula: WF6
- Molecular Weight: 298.84 g/mol
- Physical Properties: Tungsten hexafluoride is a dense gas with a boiling point of about 17.1 °C (62.8 °F) and a melting point of -2.8 °C (27 °F). It is highly volatile and readily vaporizes into a gas.
- Reactivity: WF6 is a strong oxidizing agent and reacts violently with water, moisture, and most organic compounds. It can release highly corrosive hydrofluoric acid upon contact with water.
- Uses: The primary application of tungsten hexafluoride is in the semiconductor industry. It is used as a precursor in the deposition of tungsten films during the manufacturing of integrated circuits (ICs) and other electronic devices. WF6 reacts with hydrogen gas (H2) in a CVD process to deposit tungsten metal on the substrate.
- Safety Precautions: Tungsten hexafluoride is highly toxic and corrosive. It can cause severe burns and eye damage upon contact. Proper safety measures, including the use of protective equipment, should be employed when handling this gas.
- Environmental Impact: WF6 is not considered an ozone-depleting substance, but it is a potent greenhouse gas with a high global warming potential (GWP). Therefore, its release into the environment should be strictly controlled.
It's important to note that handling WF6 should be left to trained professionals in controlled laboratory or industrial settings due to its hazardous nature.
Basic Info.
| Model NO. | WF6 | Transport Package | Cylinder |
| Specification | 10L/15kg | Trademark | CMC |
| Origin | Suzhou, China | HS Code | 2812190091 |
| Production Capacity | 200t/Year |
Tungsten Hexafluoride WF6 GAS
CAS No.: 7783-82-6
EINECS No.: 232-029-1
UN No.: UN2196
Purity: 99.999%
Dot Class: 2.3
Appearance: Colorless
Grade Standard: Electron Grade,Industrial Grade
The COA of Product:
| Test items | Units | Quality requirements | Test results |
| CF4 | ppm | <0.5 | <0.01 |
| O2 | ppm | <0.5 | <0.01 |
| N2 | ppm | <1 | 0.03 |
| CO | ppm | <0.5 | <0.02 |
| CO2 | ppm | <0.5 | <0.01 |
| SiF4 | ppm | <0.5 | <0.1 |
| SF6 | ppm | <0.5 | <0.1 |
| HF | ppm | <5 | 0.19 |
| Al | ppb | ≤10 | <0.020 |
| As | ppb | ≤10 | <0.001 |
| B | ppb | ≤10 | <0.005 |
| Ca | ppb | ≤5 | <0.200 |
| Cd | ppb | ≤2 | <0.001 |
| Cr | ppb | ≤10 | <0.020 |
| Fe | ppb | ≤10 | <0.007 |
| K | ppb | ≤5 | <0.100 |
| Mn | ppb | ≤10 | <0.001 |
| Na | ppb | ≤5 | <0.040 |
| Th | ppb | ≤0.1 | <0.001 |
| Ti | ppb | ≤10 | <0.002 |
| Li | ppb | ≤10 | <0.002 |
| U | ppb | ≤0.05 | <0.001 |
| Zn | ppb | ≤10 | <0.005 |
| Si | ppb | ≤10 | <0.100 |
| Pb | ppb | ≤10 | <0.001 |
| P | ppb | ≤2 | <0.300 |
| Mg | ppb | ≤10 | <0.020 |
| Ni | ppb | ≤20 | <0.030 |
| Cu | ppb | ≤5 | <0.005 |
| Mo | ppb | ≤10 | <0.001 |
| Total impurities of other metal | ppb | ≤500 | <0.0010 |
Detailed Photos
Shanghai Kemike Chemical Co., Ltd is staffed by trained personnel, combine many years experience in Gas industry .We supply cylinder gas, electronic gas, etc ., and the gas holder, panel, valves and fittings and other equipment, parts and engineering services to our customers in China and worldwide; The products are involved in various industrial fields, such as semiconductor chip, solar cell, LED, TFT-LCD, optical fiber, glass, laser, medicine , etc., Our mission is to partner with our global customers to provide support, solutions and quality products that are innovative,reliable, and safe.
Our products mainly include: H2, O2, N2, Ar, CO2, propane, acetylene, helium, laser mixed gas, SiH4, Sih2cl2, SiHCL3, SiCL4, NH3, CF4, NF3, SF6, HCL, N2O, doping mixed gas (TMB, PH3, B2H6) and other electronic gases.
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Company
Shanghai Kemike Chemical Co.,Ltd
Contact Person
William