Semiconductor Industry Application Wf6 Gas Tungsten Hexafluoride
Price:
US $ 15/PC
MOQ:
1 Piece
Delivery Time:
15 days
Brand:
CMC
Product Description
Product Description
Tungsten hexafluoride (WF6) is a chemical compound composed of tungsten and fluorine atoms. It is a colorless gas at room temperature and is primarily used in the semiconductor industry for the chemical vapor deposition (CVD) process to deposit thin films of tungsten.
Here are a few key points about tungsten hexafluoride gas:
- Chemical Formula: WF6
- Physical Properties: Tungsten hexafluoride is a dense gas with a density of 13.1 g/cm³. It has a boiling point of 17.1 °C (62.8 °F) and can exist as a gas at room temperature and atmospheric pressure.
- Reactivity: WF6 is highly reactive and can readily react with water vapor in the air to form tungsten oxide and hydrofluoric acid. It is also corrosive to many materials, including metals, glass, and ceramics.
- Uses: The main application of tungsten hexafluoride is in the semiconductor industry. It is used as a precursor for depositing thin films of tungsten in the fabrication of microelectronic devices. WF6 is also used in the production of tungsten metal and as a reagent in various chemical reactions.
- Safety Considerations: Tungsten hexafluoride is a toxic and corrosive substance. It can cause severe burns and eye damage upon contact. Inhalation of the gas can result in respiratory irritation and other health hazards. Proper safety precautions, such as handling it in a well-ventilated area and using appropriate personal protective equipment, are essential when working with WF6.
Basic Info.
| Model NO. | WF6 | Transport Package | Cylinder |
| Specification | 10L/15kg | Trademark | CMC |
| Origin | Suzhou, China | HS Code | 2812190091 |
| Production Capacity | 200t/Year |
Product Spec:
ungsten Hexafluoride WF6 GAS
CAS No.: 7783-82-6
EINECS No.: 232-029-1
UN No.: UN2196
Purity: 99.999%
Dot Class: 2.3
Appearance: Colorless
Grade Standard: Electron Grade,Industrial Grade
The COA of Product:
| Test items | Units | Quality requirements | Test results |
| CF4 | ppm | <0.5 | <0.01 |
| O2 | ppm | <0.5 | <0.01 |
| N2 | ppm | <1 | 0.03 |
| CO | ppm | <0.5 | <0.02 |
| CO2 | ppm | <0.5 | <0.01 |
| SiF4 | ppm | <0.5 | <0.1 |
| SF6 | ppm | <0.5 | <0.1 |
| HF | ppm | <5 | 0.19 |
| Al | ppb | ≤10 | <0.020 |
| As | ppb | ≤10 | <0.001 |
| B | ppb | ≤10 | <0.005 |
| Ca | ppb | ≤5 | <0.200 |
| Cd | ppb | ≤2 | <0.001 |
| Cr | ppb | ≤10 | <0.020 |
| Fe | ppb | ≤10 | <0.007 |
| K | ppb | ≤5 | <0.100 |
| Mn | ppb | ≤10 | <0.001 |
| Na | ppb | ≤5 | <0.040 |
| Th | ppb | ≤0.1 | <0.001 |
| Ti | ppb | ≤10 | <0.002 |
| Li | ppb | ≤10 | <0.002 |
| U | ppb | ≤0.05 | <0.001 |
| Zn | ppb | ≤10 | <0.005 |
| Si | ppb | ≤10 | <0.100 |
| Pb | ppb | ≤10 | <0.001 |
| P | ppb | ≤2 | <0.300 |
| Mg | ppb | ≤10 | <0.020 |
| Ni | ppb | ≤20 | <0.030 |
| Cu | ppb | ≤5 | <0.005 |
| Mo | ppb | ≤10 | <0.001 |
| Total impurities of other metal | ppb | ≤500 | <0.0010 |
Shanghai Kemike Chemical Co., Ltd is staffed by trained personnel, combine many years experience in Gas industry .We supply cylinder gas, electronic gas, etc ., and the gas holder, panel, valves and fittings and other equipment, parts and engineering services to our customers in China and worldwide; The products are involved in various industrial fields, such as semiconductor chip, solar cell, LED, TFT-LCD, optical fiber, glass, laser, medicine , etc., Our mission is to partner with our global customers to provide support, solutions and quality products that are innovative,reliable, and safe.
Our products mainly include: H2, O2, N2, Ar, CO2, propane, acetylene, helium, laser mixed gas, SiH4, Sih2cl2, SiHCL3, SiCL4, NH3, CF4, NF3, SF6, HCL, N2O, doping mixed gas (TMB, PH3, B2H6) and other electronic gases.
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Company
Shanghai Kemike Chemical Co.,Ltd
Contact Person
William