Semiconductor Industry Usage High Purity Wf6 Cylinder Gas Tungsten Hexafluoride
Price:
US $ 15/PC
MOQ:
1 Piece
Delivery Time:
15 days
Brand:
CMC
Product Description
Product Description
Tungsten hexafluoride (WF6) is a compound composed of tungsten and fluorine. It is a colorless, highly reactive, and volatile gas. Here are some key points about tungsten hexafluoride:
- Chemical Formula: WF6
- Molecular Weight: 297.84 g/mol
- Appearance: WF6 is a colorless gas at room temperature and pressure.
- Odor: It does not have a distinct odor.
- Reactivity: Tungsten hexafluoride is highly reactive and can react violently with water and moisture. It hydrolyzes rapidly to form tungstic acid (H2WO4) and hydrogen fluoride (HF).
- Toxicity: Like other metal halides, tungsten hexafluoride is toxic and should be handled with caution. It can cause severe irritation to the skin, eyes, and respiratory system upon exposure.
- Uses: WF6 is primarily used in the semiconductor industry for the deposition of tungsten metal during the manufacturing of integrated circuits (ICs). It is employed in a chemical vapor deposition (CVD) process to create thin films of tungsten. These films are essential for the production of microprocessors and other electronic components.
- Safety precautions: Due to its reactivity and toxicity, proper safety measures should be followed when handling tungsten hexafluoride. It should be stored and used in well-ventilated areas with appropriate personal protective equipment (PPE).
Basic Info.
| Model NO. | WF6 | Transport Package | Cylinder |
| Specification | 10L/15kg | Trademark | CMC |
| Origin | Suzhou, China | HS Code | 2812190091 |
| Production Capacity | 200t/Year |
Product Spec:
ungsten Hexafluoride WF6 GAS
CAS No.: 7783-82-6
EINECS No.: 232-029-1
UN No.: UN2196
Purity: 99.999%
Dot Class: 2.3
Appearance: Colorless
Grade Standard: Electron Grade,Industrial Grade
The COA of Product:
| Test items | Units | Quality requirements | Test results |
| CF4 | ppm | <0.5 | <0.01 |
| O2 | ppm | <0.5 | <0.01 |
| N2 | ppm | <1 | 0.03 |
| CO | ppm | <0.5 | <0.02 |
| CO2 | ppm | <0.5 | <0.01 |
| SiF4 | ppm | <0.5 | <0.1 |
| SF6 | ppm | <0.5 | <0.1 |
| HF | ppm | <5 | 0.19 |
| Al | ppb | ≤10 | <0.020 |
| As | ppb | ≤10 | <0.001 |
| B | ppb | ≤10 | <0.005 |
| Ca | ppb | ≤5 | <0.200 |
| Cd | ppb | ≤2 | <0.001 |
| Cr | ppb | ≤10 | <0.020 |
| Fe | ppb | ≤10 | <0.007 |
| K | ppb | ≤5 | <0.100 |
| Mn | ppb | ≤10 | <0.001 |
| Na | ppb | ≤5 | <0.040 |
| Th | ppb | ≤0.1 | <0.001 |
| Ti | ppb | ≤10 | <0.002 |
| Li | ppb | ≤10 | <0.002 |
| U | ppb | ≤0.05 | <0.001 |
| Zn | ppb | ≤10 | <0.005 |
| Si | ppb | ≤10 | <0.100 |
| Pb | ppb | ≤10 | <0.001 |
| P | ppb | ≤2 | <0.300 |
| Mg | ppb | ≤10 | <0.020 |
| Ni | ppb | ≤20 | <0.030 |
| Cu | ppb | ≤5 | <0.005 |
| Mo | ppb | ≤10 | <0.001 |
| Total impurities of other metal | ppb | ≤500 | <0.0010 |
Shanghai Kemike Chemical Co., Ltd is staffed by trained personnel, combine many years experience in Gas industry .We supply cylinder gas, electronic gas, etc ., and the gas holder, panel, valves and fittings and other equipment, parts and engineering services to our customers in China and worldwide; The products are involved in various industrial fields, such as semiconductor chip, solar cell, LED, TFT-LCD, optical fiber, glass, laser, medicine , etc., Our mission is to partner with our global customers to provide support, solutions and quality products that are innovative,reliable, and safe.
Our products mainly include: H2, O2, N2, Ar, CO2, propane, acetylene, helium, laser mixed gas, SiH4, Sih2cl2, SiHCL3, SiCL4, NH3, CF4, NF3, SF6, HCL, N2O, doping mixed gas (TMB, PH3, B2H6) and other electronic gases.
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Company
Shanghai Kemike Chemical Co.,Ltd
Contact Person
William