Good Price Semiconductor Industry Wf6 Cylinder Gas Tungsten Hexafluoride
Price:
US $ 15/PC
MOQ:
1 Piece
Delivery Time:
15 days
Brand:
CMC
Product Description
Product Description
Tungsten hexafluoride (WF6) is a chemical compound composed of one tungsten atom and six fluorine atoms. It is a colorless, toxic, and corrosive gas at room temperature and pressure. Here are some key points about tungsten hexafluoride gas:
- Chemical Formula: WF6
- Molecular Weight: 297.84 g/mol
- Physical Properties: Tungsten hexafluoride is a dense gas that is heavier than air. It has a boiling point of 17.1 °C (62.8 °F) and a melting point of -2.8 °C (27 °F) at standard atmospheric pressure.
- Toxicity: WF6 is highly toxic and corrosive. It can cause severe burns and eye damage upon contact. Inhalation of the gas can lead to respiratory distress and lung damage.
- Reactivity: Tungsten hexafluoride is a strong oxidizing agent and reacts readily with many substances, including water, organic compounds, and metals. It reacts violently with water, releasing highly corrosive hydrofluoric acid (HF) fumes.
- Uses: WF6 is primarily used in the semiconductor industry for the deposition of tungsten films during the fabrication of integrated circuits. It is also employed as a precursor in the production of tungsten metal and other tungsten compounds.
- Safety Precautions: Handling tungsten hexafluoride requires strict safety measures. It should be stored and used in a well-ventilated area with appropriate chemical handling equipment, such as fume hoods and protective gloves. Personal protective equipment, such as goggles and respiratory protection, should be worn when working with WF6.
It's important to note that tungsten hexafluoride gas is highly hazardous and should only be handled by trained professionals in controlled laboratory or industrial settings.
Product Spec:
Tungsten Hexafluoride WF6 GAS
CAS No.: 7783-82-6
EINECS No.: 232-029-1
UN No.: UN2196
Purity: 99.999%
Dot Class: 2.3
Appearance: Colorless
Grade Standard: Electron Grade,Industrial Grade
The COA of Product:
Tungsten Hexafluoride WF6 GAS
CAS No.: 7783-82-6
EINECS No.: 232-029-1
UN No.: UN2196
Purity: 99.999%
Dot Class: 2.3
Appearance: Colorless
Grade Standard: Electron Grade,Industrial Grade
The COA of Product:
| Test items | Units | Quality requirements | Test results |
| CF4 | ppm | <0.5 | <0.01 |
| O2 | ppm | <0.5 | <0.01 |
| N2 | ppm | <1 | 0.03 |
| CO | ppm | <0.5 | <0.02 |
| CO2 | ppm | <0.5 | <0.01 |
| SiF4 | ppm | <0.5 | <0.1 |
| SF6 | ppm | <0.5 | <0.1 |
| HF | ppm | <5 | 0.19 |
| Al | ppb | ≤10 | <0.020 |
| As | ppb | ≤10 | <0.001 |
| B | ppb | ≤10 | <0.005 |
| Ca | ppb | ≤5 | <0.200 |
| Cd | ppb | ≤2 | <0.001 |
| Cr | ppb | ≤10 | <0.020 |
| Fe | ppb | ≤10 | <0.007 |
| K | ppb | ≤5 | <0.100 |
| Mn | ppb | ≤10 | <0.001 |
| Na | ppb | ≤5 | <0.040 |
| Th | ppb | ≤0.1 | <0.001 |
| Ti | ppb | ≤10 | <0.002 |
| Li | ppb | ≤10 | <0.002 |
| U | ppb | ≤0.05 | <0.001 |
| Zn | ppb | ≤10 | <0.005 |
| Si | ppb | ≤10 | <0.100 |
| Pb | ppb | ≤10 | <0.001 |
| P | ppb | ≤2 | <0.300 |
| Mg | ppb | ≤10 | <0.020 |
| Ni | ppb | ≤20 | <0.030 |
| Cu | ppb | ≤5 | <0.005 |
| Mo | ppb | ≤10 | <0.001 |
| Total impurities of other metal | ppb | ≤500 | <0.0010 |
Detailed Photo

Shanghai Kemike Chemical Co., Ltd is staffed by trained personnel, combine many years experience in Gas industry .We supply cylinder gas, electronic gas, etc ., and the gas holder, panel, valves and fittings and other equipment, parts and engineering services to our customers in China and worldwide; The products are involved in various industrial fields, such as semiconductor chip, solar cell, LED, TFT-LCD, optical fiber, glass, laser, medicine , etc., Our mission is to partner with our global customers to provide support, solutions and quality products that are innovative,reliable, and safe.
Our products mainly include: H2, O2, N2, Ar, CO2, propane, acetylene, helium, laser mixed gas, SiH4, Sih2cl2, SiHCL3, SiCL4, NH3, CF4, NF3, SF6, HCL, N2O, doping mixed gas (TMB, PH3, B2H6) and other electronic gases.


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Company
Shanghai Kemike Chemical Co.,Ltd
Contact Person
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