1100C Quartz Tube Furnace With Solid Precursor Sublimator For CVD 2D Layers Of TMDs

Product Overview for Oxidation Diffustion Thermal Anealing Tube Furnace

PTC D110/440/12NG is a compact 1100°C CVD tube furnace with a precursor sublimating attachment. Totally four-channel gas inlets are built on the sublimation which allows feedings of various gases to carry the source vapor into the main heater for further decomposition and deposition. The sample holder fixture mounted on the right flange is slidable for easy sample loading/unloading.

Main Features

• Compact CVD furnace system with:
• 4.33" O.D x 4.05" I.D x 29.13" Length quartz tube ( OD 110 xID 103 x L 740, mm )
• 1100ºC Max. working temperature with +/- 1oC accuracy
• The water cooling flange on the right side is slidable for easy sample loading
• The water cooling flange on the left side between the heater and furnace is used for pre-heated gas input and sealing
• Four-channel gas inlet ( 1/8" Dia tube and tube fitting) are built-in on the left side flange
• One small heater is attached to the left side flange of the furnace to preheat input gas, liquid, or evaporate solid chemical, which will be then delivered to the CVD furnace:
• Please click the picture left for more details:
• 1.2''O.D x 6''L SS tube as the heating chamber
• Vacuum sealed 1" ID small quartz tube inside the heater ( Pic 2)
• 400ºC Max. working temperature ( 1000ºC heater is available upon request )
• The flange on the left side is for gas sealing and input

Ramping, Dwelling, Cooling Curves for 1200 Series Laboratory Furnaces

Safety Measures

• Built-in ammeter and dual voltmeters for easy monitoring and troubleshooting.
• Overheat protection shuts down the tube furnace if temperature is outside of acceptable range (refer to controller's manual) or when the thermocouple is broken or malfunctions
• Power failure protection resumes furnace operation right after the point of failure when power is reestablished
• Microprocessor based self-tuning PID control provides optimum thermal process with minimal overshoot

Product Gallery

Precursor sublimator device for CVD tube furnace

Technical Specifications

Application Notes

• Don't fill any explosive gasses such as Hydrogen or Methane into the furnace tube without necessary safety controls and supervision
• Laboratory tube furnaces with quartz tube are designed for use under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 MPa
• Small cracks may appear on the surface of the refractory ceramics over extended use. This is a normal occurrence and the cracks may be repaired with alumina coating

Size Comparison