Tube Furnace With Gas Supplying Device For Thin Films Heat Treatment

Product Overview for 1700C Tube Furnace

This model is consists of a heating tubular horizontal furnace and a gas supplying system, Mainly doing Heat treatment experiments for thin films (transition metal nitride and HEA nitride films, different PVD hard coatings).

Main Features

• Tmax 1700 °C
• Electric heated, Single zone, high temperature, vacuum tube furnace
• Dual steel structure, non-Split furnace chamber to protect minium heat loss
• Multiple atmosphere processes in a single cycle are available
• Max Vacuum level achieve 10E-3 torr worked with molecular pump
• Fiber-insulated chamber with powerful MoSi2 heating elemets ensure uniform temperature ensure uniform temperature
• Shimaden PID temperature controller with programmable 30 segments
• SS304 vacuum water cooling sealing flanges with valves and pressure meter included
• Dual flanges support with ends heat cover provides better sealing and safe operation
• Long life type B thermocouple
• CE certified, standard

Ramping, Dwelling, Cooling Curves for 1700 Series Tube Furnaces

Safety Measures

• Built-in ammeter and dual voltmeters for easy monitoring and troubleshooting.
• Overheat protection shuts down the tube furnace if temperature is outside of acceptable range (refer to controller's manual) or when the thermocouple is broken or malfunctions
• Power failure protection resumes furnace operation right after the point of failure when power is reestablished
• Microprocessor based self-tuning PID control provides optimum thermal process with minimal overshoot

Product Gallery

Front View for High Temperature Tube Furnace 1700 degree C

Front view for 1700 degree C High Temperature Tube Furnace 

Technical Specifications

Application Notes

• Don't fill any explosive gasses such as Hydrogen or Methane into the furnace tube without necessary safety controls and supervision
• 1700C tube furnaces with alumina tube are designed for use under vacuum and low pressure; 0.2 bars / 3 psi / 0.02 MPa
• To minimize the cracking rate of the ceramic tubes, please change the position (mark four points on the tube) each batch
• Small cracks may appear on the surface of the refractory ceramics over extended use. This is a normal occurrence and the cracks may be repaired with alumina coating

Size Comparison