1200C Multi-Zone CVD Tube Furnace OD120mm 3 Zones With Temperature Uniformity +/- 5C
1200C Multi-Zone CVD Tube Furnace (OD120mm, 3 Zones) with temperature uniformity +/- 5
Product Overview for 1700C Rotary Tube Furnace
Multi-Zone CVD Tube Furnace workstation consists of a multi heating zones tube furnace, a precision mass flow gas control station, a high vacuum pump units and other assembling parts such as furnace tube, flanges, etc. Tmax 1200°C, the ultimate vacuum rate goes to 10^-7 torr with molecular vacuum pump units. The mass flow gas control station mixes three or more kinds of gas together and inputs the mixed gas into a quartz tube or metal tubes inside the furnace. Multi-Zone Tube Furnace is competent for the experiments as CVD, Diffusion, and other thermo-treatments under vacuum status and atmosphere protection.
Main Features
- Tmax 1200°C
- Horizontal, Split, Multi-zone, CVD tube furnace
- Inconel 600 as processing tube
- Max vacuum level 10E-7 torr
- 3-channel precise mass flow gas control
- Multi-heating zones controlled separately ensure an improved temperature gradient
- Dual flanges support provides better sealing and longer tube life
- Type N thermocouples
- CE certified, standard
Safety Measures
- Built-in ammeter and dual voltmeters for easy monitoring and troubleshooting.
- Overheat protection shuts down the CVD tube furnace if temperature is outside of acceptable range (refer to controller’s manual) or when the thermocouple is broken or malfunctions.
- Power failure protection resumes furnace operation right after the point of failure when power is reestablished.
- Microprocessor based self-tuning PID control provides optimum thermal process with minimal overshoot
Product Gallery
Front View for 1200C Rotary Tube Furnace
Technical Specifications
| Model No. | PTC D120/1000/12/3 |
| Heating zone |
Four heating zones |
| Power supply | 15KW AC380-415V, 50/60Hz, 3-phase |
| Working temperature |
Tmax 1200°C (2192°F) |
| Temperature controller |
Shimaden PID controller |
| Heating rate | ≤25°C /min |
| Thermocouple | N type |
| Chamber lining | Mitsubishi Raw Material high alumina 1500# fiber board |
| Furnace tube |
Material: Quartz or Metal |
| Vacuum flanges |
SS304 sealing flanges |
| Vaccum level |
Max 10E-7 torr with molecular pump |
| Heating element |
HRE resistance coil wire |
| Shipping info | Weight: 660 kgs W2150xL1200xH1360mm |
| Compliance | CE, ISO |
| Warranty | 18 months limited warranty with lifetime technical support |
Application Notes
- Don’t fill any explosive gasses such as Hydrogen or Methane into the CVD furnace tube without necessary safety controls and supervision.
- Tube furnaces with metal tubes are designed for use under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 MPa.
- Small cracks may appear on the surface of the refractory ceramics over extended use. This is a normal occurrence and the cracks may be repaired with alumina coating
Size Comparison
| Item name | PTC D40/440/12 | PTC D80/440/12 | PTC D100/440/12 |
| Heating length | 440mm | 440mm | 440mm |
| Tube size | OD40xL800mm | OD80xL1000mm | OD100xL1000mm |
| Power | 4 KW | 7 KW | 8 KW |
| Net Weight | 108 KGS | 275 KGS | 360 KGS |
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