1700C High Temperature 3 Zones Lab CVD Vacuum Tube Furnace With OD60mm Alumina Tube

Product Overview

PTC D60/600/17/3 is a CE certified 60mm OD 3 zones tube furnace with complete vacuum sealing flange. Each heating zone is 12" in length and controlled by three precision 30 segments of digital temperature controllers independently. One zone (center zone) is heated by Super-1800 MoSi2 elements up to 1700°C, and another two zones are heated by SiC elements up to 1400°C. The tube furnace can create the various thermal gradient by adjusting three zones temperature. It is an excellent furnace to prepare functional materials under thermal gradient, and also can be used for epitaxial film growth by CVD.

Main Features

• Working temperature range 1200℃-1700℃
• Dual steel structrue, minium heat loss; Three heating zones, controlled independently
• 99.6% Alumina tube with SS304 quick opening water cooling sealing flanges
• Powerful MoSi2 heating elemets ensure uniform temperature
• Fiber-insulated chamber for maximum temperature stability and uniformity
• Digital PID controller with programmable 30 segments
• Individual set of gas supplying device, availabe gas mixing with Ar, N2 CO, H2 etc
• Long life type B thermocouple
• CE certified

Safety Measures

• Built-in ammeter and dual voltmeters for easy monitoring and troubleshooting.
• Overheat protection shuts down the furnace if temperature is outside of acceptable range (refer to controller’s manual) or when the thermocouple is broken or malfunctions.
• Power failure protection resumes furnace operation right after the point of failure when power is reestablished.
• Microprocessor based self-tuning PID control provides optimum thermal process with minimal overshoot

Product Details

1700°C three zone high temperature CVD vacuum tube furnace

• The 1700C high temperature CVD tube furnace is mainly composed of five parts: furnace body, furnace tube, flange sealing accessories, gas supplying system, vacuum system and temperature control system
• The furnace outer steel shell is processed with pickling and phosphating, environment powder coating on the surface, corrosion and oxidation resistance, built-in cooling fan, surface temperature Rt+45℃
• ISO, CE compliance

Chamber profile for 1700°C CVD high temperature 3 zones tube furnace

• High alumina ceramic insulation, CNC engraving, chamber walls coupling tightly, U type MoSi2 heator, temperature resistant up to 1800C
• Heating length 600mm, suitable for aluminua tube diameter 60mm. High alumina processing tube, temperature resistance up to 1700℃,The critical part of the heating zone inside the furnace tube is equipped with the ceramic tube plug, which can effectively prevent heat from escaping and reduce heat loss.
• B type thermocouple

Quick opening flange, furnace tube supports, 1/4" pagoda gas nozzle, vacuum pump unit

• Equipped with SS304 quick-opening water cooling flange accessories for materials fast loading and unloading, sealed with high-temperature resistant fluorine rubber sealing rings
• The air inlet and outlet adopts G1/4-inch pagoda air nozzle, which can be connected to a PTFE pipe with an outer diameter of 8mm. Max vacuum can reach 10*-7torr
• Connected molecular pump unit with KF25, make sure vacuum level reach to 10*-5mbar

HEATING PROGRAMS FOR 1700°C CVD HIGH TEMP 3 ZONES TUBE FURNACE

• Programmable 30 segments, heating rate 1-10C/min freely adjusted
• Good thermal insualtion, natural cooling, cooling down gently
• 7" touchscreen panel is optional, heating programs can be showed timely, and downloaded

Technical Specifications

Application Notes

• The processing tube pressure should be lower 0.02MPa
• Gas source should equip the pressure reducing valve
• Before filling reduction gases like H2, should pump the air out of the tube
• When filling gases from gas inlet in the tube, should make sure the gas outlet valve open

Size Comparison